JP5220049B2 - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 105
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 104
- 239000004065 semiconductor Substances 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 125
- 229910002804 graphite Inorganic materials 0.000 claims description 112
- 239000010439 graphite Substances 0.000 claims description 112
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 60
- 229910052710 silicon Inorganic materials 0.000 claims description 60
- 239000010703 silicon Substances 0.000 claims description 60
- 230000015572 biosynthetic process Effects 0.000 claims description 42
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 26
- 238000005229 chemical vapour deposition Methods 0.000 claims description 23
- 239000012535 impurity Substances 0.000 claims description 18
- 238000012544 monitoring process Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 98
- 239000007789 gas Substances 0.000 description 28
- 229910052799 carbon Inorganic materials 0.000 description 14
- 238000000137 annealing Methods 0.000 description 13
- 239000011261 inert gas Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 238000005259 measurement Methods 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000004913 activation Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 239000006200 vaporizer Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229960000541 cetyl alcohol Drugs 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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Description
現在のところ、炭化珪素ウエハはコスト的に非常に高価であり、保護膜の膜厚モニタとして使用することは回避したいという観点に立ち、発明者達は、炭化珪素ウエハではなくシリコンウエハを膜厚モニタとして用いるという技術思想に到達した。
本発明に係る実施の形態2の炭化珪素半導体装置の製造方法について、図4〜図8を用いて説明する。
以上説明した実施の形態1および2においては、ソースガスとして気化したエタノールを用いるので、取り扱いが容易であるという利点がある。
Claims (8)
- (a)炭化珪素ウエハの表面内に不純物をイオン注入して、炭化珪素半導体装置の活性領域を形成する工程と、
(b)前記活性領域形成後の前記炭化珪素ウエハの全表面および膜厚モニタ用のシリコンウエハの全表面に化学気相成長法により、グラファイト膜を形成する工程と、
(c)前記グラファイト膜の厚さを評価する工程と、を備え、
前記工程(b)は、
前記化学気相成長法による成膜温度を950℃以下として前記グラファイト膜を形成する工程を含み、
前記工程(c)は、
前記シリコンウエハ上に形成された前記グラファイト膜の厚さを測定することで、前記炭化珪素ウエハ上に形成された前記グラファイト膜の厚さを推定する工程を含む、炭化珪素半導体装置の製造方法。 - 前記工程(b)は、
前記グラファイト膜を、厚さ30nm以上500nm以下となるように成膜する工程を含む、請求項1記載の炭化珪素半導体装置の製造方法。 - 前記工程(b)は、
前記成膜温度を800℃以上950℃以下として前記グラファイト膜を形成する工程を含む、請求項1記載の炭化珪素半導体装置の製造方法。 - (a)炭化珪素ウエハの表面内に不純物をイオン注入して、炭化珪素半導体装置の活性領域を形成する工程と、
(b)前記活性領域形成後の前記炭化珪素ウエハの全表面および膜厚モニタ用のシリコンウエハの全表面に化学気相成長法により、グラファイト膜を形成する工程と、
(c)前記グラファイト膜の厚さを評価する工程と、を備え、
前記工程(b)は、
(b−1)前記化学気相成長法による成膜温度を950℃以下として、第1の厚さの第1層グラファイト膜を形成する工程と、
(b−2)前記第1層グラファイト膜の形成後、前記化学気相成長法による成膜温度を1000℃以上として、第2の厚さの第2層グラファイト膜を形成して前記グラファイト膜とする工程とを含み、
前記工程(c)は、
前記シリコンウエハ上に形成された前記グラファイト膜の厚さを測定することで、前記炭化珪素ウエハ上に形成された前記グラファイト膜の厚さを推定する工程を含む、炭化珪素半導体装置の製造方法。 - 前記工程(b)は、
前記グラファイト膜を、前記第1の厚さと前記第2の厚さとの合計が30nm以上500nm以下となるように成膜する工程を含む、請求項4記載の炭化珪素半導体装置の製造方法。 - 前記工程(b)は、
前記第1層グラファイト膜を、厚さ8nm以上10nm以下となるように成膜する工程を含む、請求項5記載の炭化珪素半導体装置の製造方法。 - 前記工程(b−1)は、
前記成膜温度を800℃以上950℃以下として前記第1層グラファイト膜を形成する工程を含み、
前記工程(b−2)は、
前記成膜温度を1000℃以上1400℃以下として前記第2層グラファイト膜を形成する工程を含む、請求項4記載の炭化珪素半導体装置の製造方法。 - 前記工程(b)は、
気化したアルコールを前記化学気相成長法のソースガスとして前記グラファイト膜を形成する工を含む、請求項1または請求項4記載の、炭化珪素半導体装置の製造方法。
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JP2010051371A JP5220049B2 (ja) | 2010-03-09 | 2010-03-09 | 炭化珪素半導体装置の製造方法 |
US12/961,868 US8084278B2 (en) | 2010-03-09 | 2010-12-07 | Method of manufacturing silicon carbide semiconductor device |
DE102011002398.4A DE102011002398B4 (de) | 2010-03-09 | 2011-01-03 | Verfahren zum Herstellen einer Siliziumcarbid-Halbleitervorrichtung |
CN201110003496.4A CN102194669B (zh) | 2010-03-09 | 2011-01-10 | 碳化硅半导体装置的制造方法 |
KR1020110020183A KR101149903B1 (ko) | 2010-03-09 | 2011-03-08 | 탄화 규소 반도체장치의 제조방법 |
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JP (1) | JP5220049B2 (ja) |
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DE102012204539B4 (de) | 2012-03-21 | 2023-12-07 | Robert Bosch Gmbh | Leistungstransistor und Verfahren zur Herstellung eines Leistungstransistors |
US9240476B2 (en) * | 2013-03-13 | 2016-01-19 | Cree, Inc. | Field effect transistor devices with buried well regions and epitaxial layers |
JP6141130B2 (ja) * | 2013-07-16 | 2017-06-07 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
JP2015065289A (ja) * | 2013-09-25 | 2015-04-09 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
JP2015065316A (ja) * | 2013-09-25 | 2015-04-09 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
JP2015065318A (ja) * | 2013-09-25 | 2015-04-09 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
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CN111463113B (zh) * | 2020-05-25 | 2023-04-11 | 哈尔滨晶创科技有限公司 | 一种用于半绝缘SiC离子掺杂退火过程的保护碳化硅表面的处理方法 |
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