JPH049376B2 - - Google Patents

Info

Publication number
JPH049376B2
JPH049376B2 JP57037771A JP3777182A JPH049376B2 JP H049376 B2 JPH049376 B2 JP H049376B2 JP 57037771 A JP57037771 A JP 57037771A JP 3777182 A JP3777182 A JP 3777182A JP H049376 B2 JPH049376 B2 JP H049376B2
Authority
JP
Japan
Prior art keywords
semiconductor
semiconductor substrate
etching
mounting table
mesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57037771A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58154234A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57037771A priority Critical patent/JPS58154234A/ja
Publication of JPS58154234A publication Critical patent/JPS58154234A/ja
Publication of JPH049376B2 publication Critical patent/JPH049376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP57037771A 1982-03-09 1982-03-09 半導体基体の腐食方法 Granted JPS58154234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57037771A JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57037771A JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Publications (2)

Publication Number Publication Date
JPS58154234A JPS58154234A (ja) 1983-09-13
JPH049376B2 true JPH049376B2 (cg-RX-API-DMAC10.html) 1992-02-20

Family

ID=12506727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57037771A Granted JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Country Status (1)

Country Link
JP (1) JPS58154234A (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172901A (en) * 1990-07-31 1992-12-22 Sharp Kabushiki Kaisha Paper feeding device
JP2721059B2 (ja) * 1991-11-06 1998-03-04 富士通テン株式会社 テープ再生装置及びその方法
JP4818133B2 (ja) 2007-01-17 2011-11-16 ニスカ株式会社 印刷装置

Also Published As

Publication number Publication date
JPS58154234A (ja) 1983-09-13

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