JPS58154234A - 半導体基体の腐食方法 - Google Patents

半導体基体の腐食方法

Info

Publication number
JPS58154234A
JPS58154234A JP57037771A JP3777182A JPS58154234A JP S58154234 A JPS58154234 A JP S58154234A JP 57037771 A JP57037771 A JP 57037771A JP 3777182 A JP3777182 A JP 3777182A JP S58154234 A JPS58154234 A JP S58154234A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
etching
semiconductor
etching method
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57037771A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049376B2 (cg-RX-API-DMAC10.html
Inventor
Isamu Fukui
勇 福井
Toshio Kawasaki
川崎　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP57037771A priority Critical patent/JPS58154234A/ja
Publication of JPS58154234A publication Critical patent/JPS58154234A/ja
Publication of JPH049376B2 publication Critical patent/JPH049376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP57037771A 1982-03-09 1982-03-09 半導体基体の腐食方法 Granted JPS58154234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57037771A JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57037771A JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Publications (2)

Publication Number Publication Date
JPS58154234A true JPS58154234A (ja) 1983-09-13
JPH049376B2 JPH049376B2 (cg-RX-API-DMAC10.html) 1992-02-20

Family

ID=12506727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57037771A Granted JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Country Status (1)

Country Link
JP (1) JPS58154234A (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172901A (en) * 1990-07-31 1992-12-22 Sharp Kabushiki Kaisha Paper feeding device
JPH05128640A (ja) * 1991-11-06 1993-05-25 Fujitsu Ten Ltd テープ再生装置
US8821054B2 (en) 2007-01-17 2014-09-02 Nisca Corporation Printer apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172901A (en) * 1990-07-31 1992-12-22 Sharp Kabushiki Kaisha Paper feeding device
JPH05128640A (ja) * 1991-11-06 1993-05-25 Fujitsu Ten Ltd テープ再生装置
US8821054B2 (en) 2007-01-17 2014-09-02 Nisca Corporation Printer apparatus

Also Published As

Publication number Publication date
JPH049376B2 (cg-RX-API-DMAC10.html) 1992-02-20

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