JPH0478524B2 - - Google Patents
Info
- Publication number
- JPH0478524B2 JPH0478524B2 JP60143860A JP14386085A JPH0478524B2 JP H0478524 B2 JPH0478524 B2 JP H0478524B2 JP 60143860 A JP60143860 A JP 60143860A JP 14386085 A JP14386085 A JP 14386085A JP H0478524 B2 JPH0478524 B2 JP H0478524B2
- Authority
- JP
- Japan
- Prior art keywords
- guide
- wafer
- height
- guide plate
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Framework For Endless Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14386085A JPS6212509A (ja) | 1985-07-02 | 1985-07-02 | ウェハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14386085A JPS6212509A (ja) | 1985-07-02 | 1985-07-02 | ウェハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6212509A JPS6212509A (ja) | 1987-01-21 |
| JPH0478524B2 true JPH0478524B2 (enrdf_load_html_response) | 1992-12-11 |
Family
ID=15348657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14386085A Granted JPS6212509A (ja) | 1985-07-02 | 1985-07-02 | ウェハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6212509A (enrdf_load_html_response) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01179166A (ja) * | 1988-01-08 | 1989-07-17 | Fuji Xerox Co Ltd | 両極性帯電型電子写真感光体 |
| US8132666B2 (en) | 2004-09-01 | 2012-03-13 | Zepf Technologies Uk Limited | Adjustable conveyor guide |
| GB0419393D0 (en) * | 2004-09-01 | 2004-10-06 | Diageo Plc | Adjustable conveyor guide |
| FR3037329A1 (fr) * | 2015-06-10 | 2016-12-16 | Sidel Participations | Dispositif pour le transport de corps creux comportant un col, notamment des preformes ou des recipients |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS579287Y2 (enrdf_load_html_response) * | 1979-08-24 | 1982-02-23 | ||
| JPS57121197U (enrdf_load_html_response) * | 1981-01-21 | 1982-07-28 |
-
1985
- 1985-07-02 JP JP14386085A patent/JPS6212509A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6212509A (ja) | 1987-01-21 |
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