JPH0478267U - - Google Patents
Info
- Publication number
- JPH0478267U JPH0478267U JP12266290U JP12266290U JPH0478267U JP H0478267 U JPH0478267 U JP H0478267U JP 12266290 U JP12266290 U JP 12266290U JP 12266290 U JP12266290 U JP 12266290U JP H0478267 U JPH0478267 U JP H0478267U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pattern
- photomask
- etching
- aperture plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000010030 laminating Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Description
第１図Ａ，Ｂ、第２図は、この考案にかかる外
装部品のパターンエツチング用治具を使用しての
実施例を示す断面図、第４図Ａ，Ｂは本治具を使
用して加工する部品の一例を示す平面図及び断面
図、第５図は、この考案に使用する、露光用多数
個取りフオトマスクフイルムの平面図である。
１……ピンガイド穴、２……開口穴、３……部
品保持溝、４……開口板、５……部品保持板、６
……ガイドピン、７……部品、８……部品の斜面
部品、９……部品のサイド部、１０……位置合せ
マーク、１１……フイルムタイプフオトレジスト
、１２……露光用多数個取りフオトマスクフイル
ム。
Figures 1A and B and Figure 2 are cross-sectional views showing examples using the pattern etching jig for exterior parts according to this invention, and Figures 4A and B are cross-sectional views showing examples using this jig. FIG. 5 is a plan view and a sectional view showing an example of the parts to be processed. FIG. 5 is a plan view of a multi-piece photomask film for exposure used in this invention. 1... Pin guide hole, 2... Opening hole, 3... Component holding groove, 4... Opening plate, 5... Part holding plate, 6
... Guide pin, 7 ... Part, 8 ... Slope part of part, 9 ... Side part of part, 10 ... Alignment mark, 11 ... Film type photoresist, 12 ... Multi-piece photo for exposure. mask film.
Claims (1)
ンのエツチング加工において、基板に被加工物が
嵌合する溝をフオトマスクのパターンピツチに合
致するよう複数個配置し、かつ感光性ドライフイ
ルムラミネート時の被加工物の高さ調整のための
開口板を組合せ、更に基板とフオトマスクフイル
ムとの位置合せのためのピンガイドを基板と開口
板上に複数個設けたことを特徴とする外装部品パ
ターンエツチング用治具。 When etching a desired pattern on the surface of a three-dimensional shape such as an exterior part, a plurality of grooves into which the workpiece fits are arranged on the substrate so as to match the pattern pitch of the photomask, and when laminating the photosensitive dry film. For pattern etching of exterior parts, characterized by combining an aperture plate for adjusting the height of the workpiece, and further providing a plurality of pin guides on the substrate and the aperture plate for positioning the substrate and photomask film. jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12266290U JPH0478267U (en) | 1990-11-22 | 1990-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12266290U JPH0478267U (en) | 1990-11-22 | 1990-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478267U true JPH0478267U (en) | 1992-07-08 |
Family
ID=31870423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12266290U Pending JPH0478267U (en) | 1990-11-22 | 1990-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478267U (en) |
-
1990
- 1990-11-22 JP JP12266290U patent/JPH0478267U/ja active Pending
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