JPH0431146U - - Google Patents
Info
- Publication number
- JPH0431146U JPH0431146U JP7255990U JP7255990U JPH0431146U JP H0431146 U JPH0431146 U JP H0431146U JP 7255990 U JP7255990 U JP 7255990U JP 7255990 U JP7255990 U JP 7255990U JP H0431146 U JPH0431146 U JP H0431146U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mask pattern
- light
- transmitting
- pattern formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Description
第１図は、実施例の断面図、第２図は、実施例
の製造方法の説明図、第３図は、別の接着剤を説
明する断面図、第４図は、従来例の断面図である
。
１１……フオトマスク、１２……第１基板、１
３……第１マスクパターン、１４……第２基板、
１５……第２マスクパターン、１６……接着剤。
Fig. 1 is a cross-sectional view of the example, Fig. 2 is an explanatory view of the manufacturing method of the example, Fig. 3 is a cross-sectional view explaining another adhesive, and Fig. 4 is a cross-sectional view of the conventional example. It is. 11...Photomask, 12...First substrate, 1
3...first mask pattern, 14...second substrate,
15...Second mask pattern, 16...Adhesive.
Claims (1)
スクパターンと、 透光性の第２基板と、 前記第２基板の上面に形成した遮光性の第２マ
スクパターンとにより構成され、 前記第１基板の第１マスクパターン側と前記第
２基板の第２マスクパターン側とを対向させて、
前記第１基板と前記第２基板とを接着させたこと
を特徴とするフオトマスク。[Claims for Utility Model Registration] A light-transmitting first substrate; a light-blocking first mask pattern formed on the lower surface of the first substrate; a light-transmitting second substrate; and an upper surface of the second substrate. a light-shielding second mask pattern formed on the substrate, with the first mask pattern side of the first substrate facing the second mask pattern side of the second substrate,
A photomask characterized in that the first substrate and the second substrate are bonded together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7255990U JPH0431146U (en) | 1990-07-06 | 1990-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7255990U JPH0431146U (en) | 1990-07-06 | 1990-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0431146U true JPH0431146U (en) | 1992-03-12 |
Family
ID=31610598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7255990U Pending JPH0431146U (en) | 1990-07-06 | 1990-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0431146U (en) |
-
1990
- 1990-07-06 JP JP7255990U patent/JPH0431146U/ja active Pending