JPH03103443U - - Google Patents
Info
- Publication number
- JPH03103443U JPH03103443U JP1129990U JP1129990U JPH03103443U JP H03103443 U JPH03103443 U JP H03103443U JP 1129990 U JP1129990 U JP 1129990U JP 1129990 U JP1129990 U JP 1129990U JP H03103443 U JPH03103443 U JP H03103443U
- Authority
- JP
- Japan
- Prior art keywords
- transparent substrate
- pattern
- photomask
- percle
- bonded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000007261 regionalization Effects 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Description
第１図ａ，ｂは本考案の第１の実施例の平面図
及び断面図、第２図ａ，ｂは第２の実施例の平面
図及び断面図、第３図ａ，ｂは従来例の平面図及
び断面図である。
１，１１……ガラス基板、２……ペリクル接着
用クロムパターン、３，１３……クロムパターン
、４，１４……接着剤、５，１５……フレーム、
６，１６……メンブレン。
Figures 1a and b are a plan view and a sectional view of the first embodiment of the present invention, Figures 2a and b are a plan view and a sectional view of the second embodiment, and Figures 3a and b are conventional examples. FIG. 2 is a plan view and a cross-sectional view of 1, 11... Glass substrate, 2... Chrome pattern for pellicle adhesion, 3, 13... Chrome pattern, 4, 14... Adhesive, 5, 15... Frame,
6,16...membrane.
Claims (1)
ーンと、前記透明基板のパターン形成面に設けら
れたペリクルとを有するフオトマスクにおいて、
前記透明基板のパターン形成面におけるペルクル
との接合面全域を同一平面としたことを特徴とす
るフオトマスク。 A photomask having a transparent substrate, a pattern formed on the transparent substrate, and a pellicle provided on the pattern formation surface of the transparent substrate,
A photomask characterized in that the entire surface of the pattern-forming surface of the transparent substrate that is bonded to the percle is the same plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1129990U JPH03103443U (en) | 1990-02-06 | 1990-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1129990U JPH03103443U (en) | 1990-02-06 | 1990-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03103443U true JPH03103443U (en) | 1991-10-28 |
Family
ID=31514832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1129990U Pending JPH03103443U (en) | 1990-02-06 | 1990-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03103443U (en) |
-
1990
- 1990-02-06 JP JP1129990U patent/JPH03103443U/ja active Pending