JPS63146849U - - Google Patents
Info
- Publication number
- JPS63146849U JPS63146849U JP1987039388U JP3938887U JPS63146849U JP S63146849 U JPS63146849 U JP S63146849U JP 1987039388 U JP1987039388 U JP 1987039388U JP 3938887 U JP3938887 U JP 3938887U JP S63146849 U JPS63146849 U JP S63146849U
- Authority
- JP
- Japan
- Prior art keywords
- chromium layer
- reticle
- utility
- attached
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
Description
第１図は本考案による一実施例を示す側断面図
、第２図は従来のレチクルの保護方法を示す側断
面図、である。
図において、１はガラス基板、２はクロム層、
３はガラス板Ａ、４はガラス板Ｂ、を示す。
FIG. 1 is a side sectional view showing an embodiment of the present invention, and FIG. 2 is a side sectional view showing a conventional reticle protection method. In the figure, 1 is a glass substrate, 2 is a chromium layer,
3 indicates glass plate A, and 4 indicates glass plate B.
Claims (1)
び前記クロム層２を形成していない面に、それぞ
れガラス板Ａ，３，Ｂ，４を貼り付けたことを特
徴とするレチクル。 A reticle characterized in that glass plates A, 3, B, and 4 are attached to the surface of the chromium layer 2 and the surface on which the chromium layer 2 is not formed, respectively, of the glass substrate 1 of the reticle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987039388U JPS63146849U (en) | 1987-03-17 | 1987-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987039388U JPS63146849U (en) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63146849U true JPS63146849U (en) | 1988-09-28 |
Family
ID=30852504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987039388U Pending JPS63146849U (en) | 1987-03-17 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63146849U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121443A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
-
1987
- 1987-03-17 JP JP1987039388U patent/JPS63146849U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121443A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
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