JPS6284046U - - Google Patents
Info
- Publication number
- JPS6284046U JPS6284046U JP1985175718U JP17571885U JPS6284046U JP S6284046 U JPS6284046 U JP S6284046U JP 1985175718 U JP1985175718 U JP 1985175718U JP 17571885 U JP17571885 U JP 17571885U JP S6284046 U JPS6284046 U JP S6284046U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- metal aluminum
- photomask
- glass plate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案によるフオトマスクの縦断面図
、第２図は従来のフオトマスクの縦断面図である
。
１……ガラス板、２……アルミ膜によるマスク
パターン、２１……着色したアルミ酸化膜による
マスクパターン。
FIG. 1 is a longitudinal sectional view of a photomask according to the present invention, and FIG. 2 is a longitudinal sectional view of a conventional photomask. 1...Glass plate, 2...Mask pattern made of aluminum film, 21...Mask pattern made of colored aluminum oxide film.
Claims (1)
ニウム薄膜によるパターンを有し、更に前記金属
アルミニウムパターンの一部または全部のパター
ン表面部に着色した層を有することを特徴とする
フオトマスク。 1. A photomask comprising a pattern made of a metal aluminum thin film having a thickness of 1 μm to 5 μm on a glass plate, and further comprising a colored layer on a part or all of the pattern surface of the metal aluminum pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985175718U JPS6284046U (en) | 1985-11-14 | 1985-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985175718U JPS6284046U (en) | 1985-11-14 | 1985-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6284046U true JPS6284046U (en) | 1987-05-28 |
Family
ID=31115294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985175718U Pending JPS6284046U (en) | 1985-11-14 | 1985-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284046U (en) |
-
1985
- 1985-11-14 JP JP1985175718U patent/JPS6284046U/ja active Pending