JPS62184554U - - Google Patents
Info
- Publication number
- JPS62184554U JPS62184554U JP1986073627U JP7362786U JPS62184554U JP S62184554 U JPS62184554 U JP S62184554U JP 1986073627 U JP1986073627 U JP 1986073627U JP 7362786 U JP7362786 U JP 7362786U JP S62184554 U JPS62184554 U JP S62184554U
- Authority
- JP
- Japan
- Prior art keywords
- film
- support
- photomask
- emulsion
- glass plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000839 emulsion Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- -1 polyethylene terephthalate Polymers 0.000 claims 1
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 1
- 239000005020 polyethylene terephthalate Substances 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Description
第１図は本考案の一実施例の断面図、第２図は
、第１図のフオトマスクを製造するのに利用され
るフイルムの断面図、第３図は従来のフオトマス
クの断面図である。
１……ガラス板、２……フイルムベース、３…
…下引層、４……ストリツプフイルム、５……支
持体層、６……乳剤膜層、７……ハレーシヨン防
止層、８……アルミパターン。
FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a sectional view of a film used to manufacture the photomask shown in FIG. 1, and FIG. 3 is a sectional view of a conventional photomask. 1...Glass plate, 2...Film base, 3...
...undercoat layer, 4... strip film, 5... support layer, 6... emulsion film layer, 7... antihalation layer, 8... aluminum pattern.
Claims (1)
レート系の支持体と、この支持体上に支持され、
かつパターンの形成された乳剤とを有するフイル
ムと、このフイルムが一面に被着されたガラス板
とからなることを特徴とするフオトマスク。 A polyethylene terephthalate support with a film thickness of 10 to 300 μm, supported on this support,
A photomask comprising: a film having an emulsion on which a pattern is formed; and a glass plate having the film coated over one surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073627U JPS62184554U (en) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073627U JPS62184554U (en) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184554U true JPS62184554U (en) | 1987-11-24 |
Family
ID=30918124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986073627U Pending JPS62184554U (en) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184554U (en) |
-
1986
- 1986-05-15 JP JP1986073627U patent/JPS62184554U/ja active Pending
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