JPH0221650U - - Google Patents
Info
- Publication number
- JPH0221650U JPH0221650U JP9848288U JP9848288U JPH0221650U JP H0221650 U JPH0221650 U JP H0221650U JP 9848288 U JP9848288 U JP 9848288U JP 9848288 U JP9848288 U JP 9848288U JP H0221650 U JPH0221650 U JP H0221650U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- protecting
- membrane
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Description
第１図は本考案の一実施例を示すペリクルの平
面図、第２図は同ペリクルの断面図、第３図は従
来のペリクルの外観斜視図、第４図は同ペリクル
の断面図、第５図は本考案の他の実施例を示すペ
リクルの平面図、第６図は第５図におけるペリク
ル膜保護用フレームの変形例を示す図である。
１１，２１……ペリクル膜、１２，２２……ペ
リクルフレーム、１３……粘着剤、１４，２４，
３１……ペリクル膜保護用フレーム、１５，２３
……フオトマスク基板、２６……アライメントマ
ーク。
Fig. 1 is a plan view of a pellicle showing an embodiment of the present invention, Fig. 2 is a sectional view of the pellicle, Fig. 3 is an external perspective view of a conventional pellicle, and Fig. 4 is a sectional view of the pellicle. FIG. 5 is a plan view of a pellicle showing another embodiment of the present invention, and FIG. 6 is a diagram showing a modification of the pellicle membrane protection frame in FIG. 5. 11, 21... Pellicle membrane, 12, 22... Pellicle frame, 13... Adhesive, 14, 24,
31...Pericle membrane protection frame, 15, 23
...Photomask board, 26...Alignment mark.
Claims (1)
ームを配設するようにしたことを特徴とするペリ
クル膜保護用フレーム付ペリクル。 A pellicle with a frame for protecting a pellicle membrane, characterized in that a frame for protecting a pellicle membrane is disposed on the pellicle frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848288U JPH0221650U (en) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848288U JPH0221650U (en) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221650U true JPH0221650U (en) | 1990-02-14 |
Family
ID=31324791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9848288U Pending JPH0221650U (en) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221650U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0559048U (en) * | 1992-01-22 | 1993-08-03 | 石川ガスケット株式会社 | Internal combustion engine gasket protection device |
-
1988
- 1988-07-27 JP JP9848288U patent/JPH0221650U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0559048U (en) * | 1992-01-22 | 1993-08-03 | 石川ガスケット株式会社 | Internal combustion engine gasket protection device |