JPS6333154U - - Google Patents
Info
- Publication number
- JPS6333154U JPS6333154U JP1986125906U JP12590686U JPS6333154U JP S6333154 U JPS6333154 U JP S6333154U JP 1986125906 U JP1986125906 U JP 1986125906U JP 12590686 U JP12590686 U JP 12590686U JP S6333154 U JPS6333154 U JP S6333154U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- mask substrate
- pellicle frame
- pericles
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 description 1
Description
第１図および第２図は、本考案のペリクルを示
す図、第３図はマスク基板上にペリクルを装着し
た状態を示す図、第４図は従来例を示す図である
。
１…ペリクル、２…ペリクル膜、３…ペリクル
枠、３ａ…切欠き部、４…マスク基板。
1 and 2 are views showing the pellicle of the present invention, FIG. 3 is a view showing the pellicle mounted on a mask substrate, and FIG. 4 is a view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Pellicle, 2... Pellicle membrane, 3... Pellicle frame, 3a... Notch part, 4... Mask substrate.
Claims (1)
るペリクルにおいて、該ペリクル枠には、マスク
基板に装着した際マスク基板と接する側の外周部
に沿つて切欠きが設けられていることを特徴とす
るペリクル。 A pellicle in which a transparent pellicle film is provided on a pellicle frame, characterized in that the pellicle frame is provided with a notch along the outer periphery of the side that contacts the mask substrate when attached to the mask substrate. Pericles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125906U JPS6333154U (en) | 1986-08-20 | 1986-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125906U JPS6333154U (en) | 1986-08-20 | 1986-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6333154U true JPS6333154U (en) | 1988-03-03 |
Family
ID=31019212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986125906U Pending JPS6333154U (en) | 1986-08-20 | 1986-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333154U (en) |
-
1986
- 1986-08-20 JP JP1986125906U patent/JPS6333154U/ja active Pending