JPH0190044U - - Google Patents
Info
- Publication number
- JPH0190044U JPH0190044U JP18543387U JP18543387U JPH0190044U JP H0190044 U JPH0190044 U JP H0190044U JP 18543387 U JP18543387 U JP 18543387U JP 18543387 U JP18543387 U JP 18543387U JP H0190044 U JPH0190044 U JP H0190044U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- support frame
- outer periphery
- grip
- shaped grip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は支持枠の外周にそつて溝を持つ方形ペ
リクルと本考案のコの字型つかみ具を例示したも
のであり、第２図はペリクルをコの字型つかみ具
に装着した図とその断面図である。第３図は第１
図と同形状のコの字型つかみ具を外周にそつて溝
を持つ円形ペリクルに適用した例を示す。第４図
は本考案のコの字型つかみ具のとりうる形状を例
示したものであり、第５図はその断面形状を例示
したものである。
１……ペリクル、２……コの字型つかみ具、３
……ペリクル薄膜、４……ペリクル支持枠、５…
…両面テープ。
Figure 1 shows an example of a rectangular pellicle with a groove along the outer periphery of the support frame and the U-shaped grip of the present invention, and Figure 2 shows the pellicle attached to the U-shaped grip. FIG. Figure 3 is the first
An example is shown in which a U-shaped grip similar to the one shown in the figure is applied to a circular pellicle with a groove along the outer periphery. FIG. 4 illustrates possible shapes of the U-shaped grip of the present invention, and FIG. 5 illustrates its cross-sectional shape. 1...Pericle, 2...U-shaped grip, 3
... Pellicle thin film, 4 ... Pellicle support frame, 5 ...
…double-sided tape.
Claims (1)
なくとも２点以上を支持してなるコの字型ペリク
ルつかみ具。 A U-shaped pellicle grip that supports at least two points in a groove formed along the outer periphery of a pellicle support frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18543387U JPH0190044U (en) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18543387U JPH0190044U (en) | 1987-12-07 | 1987-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0190044U true JPH0190044U (en) | 1989-06-14 |
Family
ID=31476751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18543387U Pending JPH0190044U (en) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0190044U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002318451A (en) * | 2001-04-24 | 2002-10-31 | Asahi Kasei Electronics Co Ltd | Frame for pellicle and its manufacturing method |
| JP2007304491A (en) * | 2006-05-15 | 2007-11-22 | Shin Etsu Chem Co Ltd | Pellicle and pellicle removing device |
| JP2011007935A (en) * | 2009-06-24 | 2011-01-13 | Shin-Etsu Chemical Co Ltd | Pellicle frame and lithographic pellicle |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6249153B2 (en) * | 1982-10-15 | 1987-10-17 | Mitsubishi Electric Corp |
-
1987
- 1987-12-07 JP JP18543387U patent/JPH0190044U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6249153B2 (en) * | 1982-10-15 | 1987-10-17 | Mitsubishi Electric Corp |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002318451A (en) * | 2001-04-24 | 2002-10-31 | Asahi Kasei Electronics Co Ltd | Frame for pellicle and its manufacturing method |
| JP2007304491A (en) * | 2006-05-15 | 2007-11-22 | Shin Etsu Chem Co Ltd | Pellicle and pellicle removing device |
| JP4637053B2 (en) * | 2006-05-15 | 2011-02-23 | 信越化学工業株式会社 | Pellicle and pellicle peeling device |
| JP2011007935A (en) * | 2009-06-24 | 2011-01-13 | Shin-Etsu Chemical Co Ltd | Pellicle frame and lithographic pellicle |