JPH0429657U - - Google Patents
Info
- Publication number
- JPH0429657U JPH0429657U JP6970790U JP6970790U JPH0429657U JP H0429657 U JPH0429657 U JP H0429657U JP 6970790 U JP6970790 U JP 6970790U JP 6970790 U JP6970790 U JP 6970790U JP H0429657 U JPH0429657 U JP H0429657U
- Authority
- JP
- Japan
- Prior art keywords
- target
- pedestal
- fixed
- sputtering
- fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 238000005477 sputtering target Methods 0.000 claims 3
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図、第２図は実施例の断面図、第３図は他
の実施例の断面図、第４図は変形例の断面図、第
５図は実施例の特性図である。
図において、２……台座、４……ターゲツト、
８……ビス。
1 and 2 are sectional views of the embodiment, FIG. 3 is a sectional view of another embodiment, FIG. 4 is a sectional view of a modified example, and FIG. 5 is a characteristic diagram of the embodiment. In the figure, 2... pedestal, 4... target,
8...Bis.
Claims (1)
ング・ターゲツトにおいて、 成膜すべきスパツタリング膜を構成する元素の
少なくとも１種の元素を含む固定具により、ター
ゲツトを台座に固定したことを特徴とする、スパ
ツタリング・ターゲツト。 (2) 固定具でターゲツトの中央部を台座に固定
したことを特徴とする、請求項１に記載のスパツ
タリング・ターゲツト。[Scope of Claim for Utility Model Registration] (1) In a sputtering target in which the target is fixed to a pedestal, the target is fixed to the pedestal with a fixture containing at least one element constituting the sputtering film to be formed. A sputtering target characterized by: (2) The sputtering target according to claim 1, wherein the center portion of the target is fixed to the pedestal with a fixture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6970790U JPH0429657U (en) | 1990-06-30 | 1990-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6970790U JPH0429657U (en) | 1990-06-30 | 1990-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429657U true JPH0429657U (en) | 1992-03-10 |
Family
ID=31605245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6970790U Pending JPH0429657U (en) | 1990-06-30 | 1990-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429657U (en) |
-
1990
- 1990-06-30 JP JP6970790U patent/JPH0429657U/ja active Pending