JPS6189854U - - Google Patents
Info
- Publication number
- JPS6189854U JPS6189854U JP1984175107U JP17510784U JPS6189854U JP S6189854 U JPS6189854 U JP S6189854U JP 1984175107 U JP1984175107 U JP 1984175107U JP 17510784 U JP17510784 U JP 17510784U JP S6189854 U JPS6189854 U JP S6189854U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- film
- metal frame
- coated
- transparent conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000012528 membrane Substances 0.000 description 2
Description
第１図はペリクル防塵膜の概略断面図である。
１…ペリクル膜、２…金属フレーム、３…フレ
ームの下面。
FIG. 1 is a schematic cross-sectional view of a pellicle dustproof membrane. 1... Pellicle membrane, 2... Metal frame, 3... Bottom surface of frame.
Claims (1)
膜とからなるペリクル防塵膜において、前記ペリ
クル膜の少なくとも外側表面に透明導電膜が被着
されていることを特徴とするペリクル防塵膜。 A pellicle dustproof film comprising a metal frame and a pellicle film attached to the metal frame, characterized in that a transparent conductive film is coated on at least the outer surface of the pellicle film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984175107U JPS6189854U (en) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984175107U JPS6189854U (en) | 1984-11-20 | 1984-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6189854U true JPS6189854U (en) | 1986-06-11 |
Family
ID=30732711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984175107U Pending JPS6189854U (en) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6189854U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020020984A (en) * | 2018-08-01 | 2020-02-06 | 旭化成株式会社 | Pellicle and method for producing the same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5113577A (en) * | 1974-06-19 | 1976-02-03 | Western Electric Co | |
| JPS55161240A (en) * | 1979-06-04 | 1980-12-15 | Dainippon Printing Co Ltd | Photomask |
| JPS5741639A (en) * | 1980-08-25 | 1982-03-08 | Fujitsu Ltd | Treatment of photomask to provide electric conductivity |
-
1984
- 1984-11-20 JP JP1984175107U patent/JPS6189854U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5113577A (en) * | 1974-06-19 | 1976-02-03 | Western Electric Co | |
| JPS55161240A (en) * | 1979-06-04 | 1980-12-15 | Dainippon Printing Co Ltd | Photomask |
| JPS5741639A (en) * | 1980-08-25 | 1982-03-08 | Fujitsu Ltd | Treatment of photomask to provide electric conductivity |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020020984A (en) * | 2018-08-01 | 2020-02-06 | 旭化成株式会社 | Pellicle and method for producing the same |