JPS62149044U - - Google Patents
Info
- Publication number
- JPS62149044U JPS62149044U JP1986036144U JP3614486U JPS62149044U JP S62149044 U JPS62149044 U JP S62149044U JP 1986036144 U JP1986036144 U JP 1986036144U JP 3614486 U JP3614486 U JP 3614486U JP S62149044 U JPS62149044 U JP S62149044U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle body
- frame
- cleaned
- joined
- pellicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Description
第１図は本考案のペリクル体の構造断面図、第
２図は従来のペリクル体の構造断面図、第３図は
マスクにペリクル体を貼つた状態を表わす断面図
である。
１は膜、２はフレーム、３は反射防止層、４は
接着層、５は粘着層、６は保護フイルム、７は膜
の上面、８はマスクを表わす。
FIG. 1 is a structural sectional view of a pellicle body of the present invention, FIG. 2 is a structural sectional view of a conventional pellicle body, and FIG. 3 is a sectional view showing a state in which the pellicle body is attached to a mask. 1 is a film, 2 is a frame, 3 is an antireflection layer, 4 is an adhesive layer, 5 is an adhesive layer, 6 is a protective film, 7 is the upper surface of the film, and 8 is a mask.
Claims (1)
せしめられた面のみに反射防止層を有することを
特徴とする光線透過性に優れているとともに膜面
を洗浄することができるペリクル体。 A pellicle body which has excellent light transmittance and whose membrane surface can be cleaned, characterized in that a film forming a main part of the pellicle body has an antireflection layer only on the surface to which a frame is joined.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986036144U JPH0529474Y2 (en) | 1986-03-14 | 1986-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986036144U JPH0529474Y2 (en) | 1986-03-14 | 1986-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62149044U true JPS62149044U (en) | 1987-09-21 |
| JPH0529474Y2 JPH0529474Y2 (en) | 1993-07-28 |
Family
ID=30846276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986036144U Expired - Lifetime JPH0529474Y2 (en) | 1986-03-14 | 1986-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0529474Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60237450A (en) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | Dust preventing cover for nonreflective photomask-reticle and its manufacture |
-
1986
- 1986-03-14 JP JP1986036144U patent/JPH0529474Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60237450A (en) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | Dust preventing cover for nonreflective photomask-reticle and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0529474Y2 (en) | 1993-07-28 |