JPS6214451U - - Google Patents
Info
- Publication number
- JPS6214451U JPS6214451U JP1985103565U JP10356585U JPS6214451U JP S6214451 U JPS6214451 U JP S6214451U JP 1985103565 U JP1985103565 U JP 1985103565U JP 10356585 U JP10356585 U JP 10356585U JP S6214451 U JPS6214451 U JP S6214451U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- pellicle
- bonded
- adhesive layer
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 239000012982 microporous membrane Substances 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
Description
第１図は本考案のペリクル体の構造断面図、第
２図は従来のペリクル体の構造断面図、第３図は
マスクにペリクル体を貼つた状態を表わす断面図
である。各図においては１はペリクル膜、２は接
着層、３はフレーム、４は粘着層、５は保護膜、
６はマスク、７は空間、８は微多孔性の膜、９は
接合層を表わす。
FIG. 1 is a structural sectional view of the pellicle body of the present invention, FIG. 2 is a structural sectional view of a conventional pellicle body, and FIG. 3 is a sectional view showing the state in which the pellicle body is attached to a mask. In each figure, 1 is a pellicle film, 2 is an adhesive layer, 3 is a frame, 4 is an adhesive layer, 5 is a protective film,
6 represents a mask, 7 represents a space, 8 represents a microporous membrane, and 9 represents a bonding layer.
Claims (1)
合しかつフレームに接合しない他の面には粘着層
を有する微多孔性の膜とからなることを特徴とす
るリソグラフイー用の通気性ペリクル体。 1. A breathable pellicle body for lithography, comprising a frame equipped with a pellicle membrane and a microporous membrane that is bonded to the frame and has an adhesive layer on the other side that is not bonded to the frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103565U JPS6214451U (en) | 1985-07-09 | 1985-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103565U JPS6214451U (en) | 1985-07-09 | 1985-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214451U true JPS6214451U (en) | 1987-01-28 |
Family
ID=30976238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985103565U Pending JPS6214451U (en) | 1985-07-09 | 1985-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214451U (en) |
-
1985
- 1985-07-09 JP JP1985103565U patent/JPS6214451U/ja active Pending