JPH0221649U - - Google Patents
Info
- Publication number
- JPH0221649U JPH0221649U JP9838788U JP9838788U JPH0221649U JP H0221649 U JPH0221649 U JP H0221649U JP 9838788 U JP9838788 U JP 9838788U JP 9838788 U JP9838788 U JP 9838788U JP H0221649 U JPH0221649 U JP H0221649U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- pellicle
- flange portion
- mounting
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Description
第１図は本考案の実施例を示す図、第２図は従
来のペリクル取り付け構造を示す図である。
図において、１０はペリクル膜、１１はペリク
ル枠、１２は取り付け枠、１３は固定枠、１４は
接着剤、１５はマスク又はレチクル、を示す。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing a conventional pellicle mounting structure. In the figure, 10 is a pellicle membrane, 11 is a pellicle frame, 12 is a mounting frame, 13 is a fixing frame, 14 is an adhesive, and 15 is a mask or reticle.
Claims (1)
１の上面にペリクル膜１０を張り付け、マスク又
はレチクル１５には前記ペリクル枠１１のフラン
ジ部１１ａの外周を取り巻き且つ該フランジ部１
１ａと同じ厚さの枠状の取り付け枠１２を接着固
定し、該取り付け枠１２にねじ止めできる固定枠
１３で前記ペリクル枠１１のフランジ部１１ａを
押圧固定したことを特徴とするペリクル取り付け
構造。 Pellicle frame 1 having a flange portion 11a at the bottom
A pellicle film 10 is pasted on the upper surface of the pellicle frame 1, and a mask or reticle 15 has a pellicle film 10 surrounding the outer periphery of the flange portion 11a of the pellicle frame 11 and the flange portion 1.
A pellicle mounting structure characterized in that a frame-shaped mounting frame 12 having the same thickness as 1a is adhesively fixed, and a flange part 11a of the pellicle frame 11 is fixed by pressure with a fixing frame 13 that can be screwed to the mounting frame 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9838788U JPH0221649U (en) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9838788U JPH0221649U (en) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221649U true JPH0221649U (en) | 1990-02-14 |
Family
ID=31324605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9838788U Pending JPH0221649U (en) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221649U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100796343B1 (en) * | 2006-03-27 | 2008-01-21 | 권선용 | Inner jig for pellicle frame |
| JP2014228868A (en) * | 2013-05-21 | 2014-12-08 | 上海和輝光電有限公司Ｅｖｅｒｄｉｓｐｌａｙ Ｏｐｔｒｏｎｉｃｓ （Ｓｈａｎｇｈａｉ） Ｌｉｍｉｔｅｄ | Pellicle frame, photomask and method of attaching the pellicle frame |
-
1988
- 1988-07-27 JP JP9838788U patent/JPH0221649U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100796343B1 (en) * | 2006-03-27 | 2008-01-21 | 권선용 | Inner jig for pellicle frame |
| JP2014228868A (en) * | 2013-05-21 | 2014-12-08 | 上海和輝光電有限公司Ｅｖｅｒｄｉｓｐｌａｙ Ｏｐｔｒｏｎｉｃｓ （Ｓｈａｎｇｈａｉ） Ｌｉｍｉｔｅｄ | Pellicle frame, photomask and method of attaching the pellicle frame |
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