JPS63122348U - - Google Patents
Info
- Publication number
- JPS63122348U JPS63122348U JP1987015305U JP1530587U JPS63122348U JP S63122348 U JPS63122348 U JP S63122348U JP 1987015305 U JP1987015305 U JP 1987015305U JP 1530587 U JP1530587 U JP 1530587U JP S63122348 U JPS63122348 U JP S63122348U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- utility
- pellicle
- model registration
- pellicle frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
Description
第１図は本案に係るペリクルの断面図、第２図
は離形用ライナーの平面図である。
１…ペリクル枠、２…ペリクル膜、３，４，６
…粘着剤、５…離形用ライナー、７…全面ライナ
ー、８…耳片。
FIG. 1 is a sectional view of a pellicle according to the present invention, and FIG. 2 is a plan view of a release liner. 1... Pellicle frame, 2... Pellicle membrane, 3, 4, 6
...Adhesive, 5. Release liner, 7. Full liner, 8. Ledge piece.
Claims (1)
ペリクル膜とよりなり、フオトマスクやレチクル
等に装着されてパターン上に異物が付着するのを
防止するペリクルにおいて、開口側のペリクル枠
他側面をペリクル枠に剥離可能に貼着される全面
ライナーで密封したことを特徴とする無発塵性防
塵膜。 (2) ペリクル枠内面及び全面ライナーの内側全
面に粘着層を設けてなる実用新案登録請求の範囲
第１項記載の無発塵性防塵膜。 (3) ペリクル枠に設けられた粘着層と内側全面
に粘着層が設けられた全面ライナーとが離形用ラ
イナーを介して剥離可能に貼着されている実用新
案登録請求の範囲第２項記載の無発塵性防塵膜。 (4) 離形用ライナーの一部に側方に突出する耳
部を設けてなる実用新案登録請求の範囲第３項記
載の無発塵性防塵膜。[Claims for Utility Model Registration] (1) Consists of a pellicle frame and a pellicle film stretched over one side of the frame, which is attached to a photomask, reticle, etc. to prevent foreign matter from adhering to the pattern. A dust-free dust-proof film characterized in that, in a pellicle, the opening side of the pellicle frame and other sides are sealed with a full-surface liner that is removably adhered to the pellicle frame. (2) The dust-free dust-proof membrane according to claim 1 of the utility model registration claim, which is provided with an adhesive layer on the inner surface of the pellicle frame and the entire inner surface of the full-surface liner. (3) Utility model registration claim 2, in which the adhesive layer provided on the pellicle frame and the entire liner with the adhesive layer provided on the entire inner surface are releasably attached via a release liner. Dust-free dustproof membrane. (4) The dust-free dustproof membrane according to claim 3 of the utility model registration claim, wherein a part of the release liner is provided with an ear that projects laterally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987015305U JPS63122348U (en) | 1987-02-03 | 1987-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987015305U JPS63122348U (en) | 1987-02-03 | 1987-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63122348U true JPS63122348U (en) | 1988-08-09 |
Family
ID=30806113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987015305U Pending JPS63122348U (en) | 1987-02-03 | 1987-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122348U (en) |
-
1987
- 1987-02-03 JP JP1987015305U patent/JPS63122348U/ja active Pending