JPH03114845U - - Google Patents
Info
- Publication number
- JPH03114845U JPH03114845U JP2302490U JP2302490U JPH03114845U JP H03114845 U JPH03114845 U JP H03114845U JP 2302490 U JP2302490 U JP 2302490U JP 2302490 U JP2302490 U JP 2302490U JP H03114845 U JPH03114845 U JP H03114845U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- protection film
- surface protection
- exposure
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Description
第１図は本考案の表面保護フイルムの一実施例
を示す図、第２図は従来例を示す図である。
３０……露光用原稿、９……離型層、１０……
基材、１１……粘着層、８０……表面保護フイル
ム。
FIG. 1 is a diagram showing an embodiment of the surface protection film of the present invention, and FIG. 2 is a diagram showing a conventional example. 30... Original for exposure, 9... Release layer, 10...
Base material, 11... Adhesive layer, 80... Surface protection film.
Claims (1)
層の反対面に離型層を設けたことを特徴とするフ
オトレジストの露光用原稿の表面保護フイルム。 A surface protection film for a photoresist original for exposure, characterized in that an adhesive layer is provided on one side of a thin transparent support, and a release layer is provided on the opposite side of the adhesive layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990023024U JP2589276Y2 (en) | 1990-03-07 | 1990-03-07 | Surface protection film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990023024U JP2589276Y2 (en) | 1990-03-07 | 1990-03-07 | Surface protection film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03114845U true JPH03114845U (en) | 1991-11-26 |
| JP2589276Y2 JP2589276Y2 (en) | 1999-01-27 |
Family
ID=31526027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990023024U Expired - Lifetime JP2589276Y2 (en) | 1990-03-07 | 1990-03-07 | Surface protection film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2589276Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4716557B2 (en) * | 2000-12-05 | 2011-07-06 | 株式会社きもと | Surface protection film |
| JP2013518296A (en) * | 2010-01-22 | 2013-05-20 | エルジー・ケム・リミテッド | Adhesive film for alignment treatment of photo-alignment film |
| WO2014175088A1 (en) * | 2013-04-22 | 2014-10-30 | 日東電工株式会社 | Adhesive sheet for roll protection purposes |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS584338A (en) * | 1981-06-26 | 1983-01-11 | Sanei Seisakusho:Kk | Apparatus for pressing chips |
| JPS61153049A (en) * | 1984-12-25 | 1986-07-11 | Takeshi Teragaki | Magnetic revolution transmitting device |
| JPS61153049U (en) * | 1985-03-15 | 1986-09-22 | ||
| JPS6488550A (en) * | 1987-09-30 | 1989-04-03 | Sharp Kk | Photomask |
| JPH01173040A (en) * | 1987-12-28 | 1989-07-07 | Dainippon Printing Co Ltd | Glass pattern for photoengraving |
-
1990
- 1990-03-07 JP JP1990023024U patent/JP2589276Y2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS584338A (en) * | 1981-06-26 | 1983-01-11 | Sanei Seisakusho:Kk | Apparatus for pressing chips |
| JPS61153049A (en) * | 1984-12-25 | 1986-07-11 | Takeshi Teragaki | Magnetic revolution transmitting device |
| JPS61153049U (en) * | 1985-03-15 | 1986-09-22 | ||
| JPS6488550A (en) * | 1987-09-30 | 1989-04-03 | Sharp Kk | Photomask |
| JPH01173040A (en) * | 1987-12-28 | 1989-07-07 | Dainippon Printing Co Ltd | Glass pattern for photoengraving |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4716557B2 (en) * | 2000-12-05 | 2011-07-06 | 株式会社きもと | Surface protection film |
| JP2013518296A (en) * | 2010-01-22 | 2013-05-20 | エルジー・ケム・リミテッド | Adhesive film for alignment treatment of photo-alignment film |
| WO2014175088A1 (en) * | 2013-04-22 | 2014-10-30 | 日東電工株式会社 | Adhesive sheet for roll protection purposes |
| JP2014210897A (en) * | 2013-04-22 | 2014-11-13 | 日東電工株式会社 | Adhesive sheet for roll protection |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2589276Y2 (en) | 1999-01-27 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |