JPS63122347U - - Google Patents
Info
- Publication number
- JPS63122347U JPS63122347U JP1987013194U JP1319487U JPS63122347U JP S63122347 U JPS63122347 U JP S63122347U JP 1987013194 U JP1987013194 U JP 1987013194U JP 1319487 U JP1319487 U JP 1319487U JP S63122347 U JPS63122347 U JP S63122347U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- dustproof device
- photomask
- adhesive member
- photomask dustproof
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 description 1
Description
第１図はこの考案の一実施例を示すフオトマス
ク防塵装置の断面図であり、第２図および第３図
は従来のフオトマスク防塵装置の断面図であ。
１は防塵膜、２はフレーム、３は接着剤、４は
テープ、５は接着剤、６はテープ、７は異物であ
る。なお、図中同一符号は同一または相当部分を
示す。
FIG. 1 is a sectional view of a photomask dustproof device showing an embodiment of this invention, and FIGS. 2 and 3 are sectional views of a conventional photomask dustproof device. 1 is a dustproof film, 2 is a frame, 3 is an adhesive, 4 is a tape, 5 is an adhesive, 6 is a tape, and 7 is a foreign substance. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
を設けたことを特徴とするフオトマスク防塵装置
。 (2) 前記フオトマスク防塵装置がフレームと、
前記フレームの上面に設けた防塵膜とからなるこ
とを特徴とする実用新案登録請求の範囲第１項記
載のフオトマスク防塵装置。 (3) 前記フレーム下面に接着性部材を設けたこ
とを特徴とする実用新案登録請求の範囲第２項記
載のフオトマスク防塵装置。 (4) 前記フレームの下面に設ける接着性部材と
、内側に設ける接着性部材を同一部材で形成する
ことを特徴とする実用新案登録請求の範囲第３項
記載のフオトマスク防塵装置。 (5) 前記フレームの内側に設けた接着性部材に
、テープを貼付けたことを特徴とする実用新案登
録請求の範囲第１項記載のフオトマスク防塵装置
。[Scope of Claim for Utility Model Registration] (1) A photomask dustproof device characterized in that an adhesive member is provided inside the photomask dustproof device. (2) The photomask dustproof device includes a frame;
The photomask dustproof device according to claim 1, further comprising a dustproof film provided on the upper surface of the frame. (3) The photomask dustproof device according to claim 2, which is characterized in that an adhesive member is provided on the lower surface of the frame. (4) The photomask dustproof device according to claim 3, wherein the adhesive member provided on the lower surface of the frame and the adhesive member provided inside the frame are made of the same material. (5) The photomask dustproof device according to claim 1, which is characterized in that a tape is attached to an adhesive member provided inside the frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987013194U JPS63122347U (en) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987013194U JPS63122347U (en) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63122347U true JPS63122347U (en) | 1988-08-09 |
Family
ID=30802024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987013194U Pending JPS63122347U (en) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122347U (en) |
-
1987
- 1987-01-30 JP JP1987013194U patent/JPS63122347U/ja active Pending
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