JPS6214450U - - Google Patents
Info
- Publication number
- JPS6214450U JPS6214450U JP1985103564U JP10356485U JPS6214450U JP S6214450 U JPS6214450 U JP S6214450U JP 1985103564 U JP1985103564 U JP 1985103564U JP 10356485 U JP10356485 U JP 10356485U JP S6214450 U JPS6214450 U JP S6214450U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- membrane
- breathable
- lithography
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims 1
- 239000012982 microporous membrane Substances 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 1
Description
第１図は本考案のペリクル体の構造断面図、第
２図は従来のペリクル体の構造断面図、第３図は
マスクにペリクル体を貼つた状態を表わす断面図
である。
１はペリクル膜、２は接着層、３はフレーム、
４は粘着層、５は保護膜、６はマスク、７は空間
、８は通気口、９は微多孔性の膜を表わす。
FIG. 1 is a structural sectional view of the pellicle body of the present invention, FIG. 2 is a structural sectional view of a conventional pellicle body, and FIG. 3 is a sectional view showing the state in which the pellicle body is attached to a mask. 1 is a pellicle membrane, 2 is an adhesive layer, 3 is a frame,
4 is an adhesive layer, 5 is a protective film, 6 is a mask, 7 is a space, 8 is a vent, and 9 is a microporous film.
Claims (1)
性の膜を装着した通気口を設けたことを特徴とす
るリソグラフイー用の通気性ペリクル体。 A breathable pellicle body for lithography, characterized in that a part of the frame equipped with a pellicle membrane is provided with a vent hole equipped with a microporous membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103564U JPS6214450U (en) | 1985-07-09 | 1985-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985103564U JPS6214450U (en) | 1985-07-09 | 1985-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214450U true JPS6214450U (en) | 1987-01-28 |
Family
ID=30976236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985103564U Pending JPS6214450U (en) | 1985-07-09 | 1985-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214450U (en) |
-
1985
- 1985-07-09 JP JP1985103564U patent/JPS6214450U/ja active Pending