JPH02104353U - - Google Patents
Info
- Publication number
- JPH02104353U JPH02104353U JP1342689U JP1342689U JPH02104353U JP H02104353 U JPH02104353 U JP H02104353U JP 1342689 U JP1342689 U JP 1342689U JP 1342689 U JP1342689 U JP 1342689U JP H02104353 U JPH02104353 U JP H02104353U
- Authority
- JP
- Japan
- Prior art keywords
- case body
- pellicle
- reticle
- case
- fixed position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 1
Description
第１図は一実施例における第１のケース本体と
蓋を示す断面図、第２図は同実施例のケース本体
を示す平面図、第３図は第１と第２のケース本体
を組み合わせた状態を示す断面図である。
２，２ａ……ケース本体、６，６ａ……ペリク
ル、８，８ａ……突起、１０，１０ａ……バネ、
１２，１２ａ……突条、１４，１４ａ……ペリク
ルの枠、１６，１６ａ……膜、２２，２２ａ……
突起、２４……突起、２６……バネ、２８……レ
チクル。
Fig. 1 is a sectional view showing the first case body and lid in one embodiment, Fig. 2 is a plan view showing the case main body of the same embodiment, and Fig. 3 is a combination of the first and second case bodies. It is a sectional view showing a state. 2, 2a... Case body, 6, 6a... Pellicle, 8, 8a... Protrusion, 10, 10a... Spring,
12, 12a... protrusion, 14, 14a... pellicle frame, 16, 16a... membrane, 22, 22a...
Protrusion, 24...Protrusion, 26...Spring, 28...Reticle.
Claims (1)
面用ペリクルを収納している第１のケース本体と
、レチクルを挾んでこの第１のケース本体に対向
して組み合わされる第２のケース本体とを備えた
ペリクルケース。 (2) 前記第２のケース本体はレチクルに対して
定まつた位置にガラス面用ペリクルを収納してい
る請求項１記載のペリクルケース。[Claims for Utility Model Registration] (1) A first case body housing a pattern surface pellicle at a fixed position relative to the reticle, and a case body facing the first case body with the reticle in between. A pellicle case comprising a second case body to be combined. (2) The pellicle case according to claim 1, wherein the second case body accommodates a glass surface pellicle in a fixed position with respect to the reticle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1342689U JPH02104353U (en) | 1989-02-06 | 1989-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1342689U JPH02104353U (en) | 1989-02-06 | 1989-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104353U true JPH02104353U (en) | 1990-08-20 |
Family
ID=31223723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1342689U Pending JPH02104353U (en) | 1989-02-06 | 1989-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104353U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05197135A (en) * | 1991-08-26 | 1993-08-06 | Yung-Tsai Yen | Holding device for holding optical pellicle and method for using optical pellicle |
-
1989
- 1989-02-06 JP JP1342689U patent/JPH02104353U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05197135A (en) * | 1991-08-26 | 1993-08-06 | Yung-Tsai Yen | Holding device for holding optical pellicle and method for using optical pellicle |