JPS6155336U - - Google Patents

Info

Publication number
JPS6155336U
JPS6155336U JP14140684U JP14140684U JPS6155336U JP S6155336 U JPS6155336 U JP S6155336U JP 14140684 U JP14140684 U JP 14140684U JP 14140684 U JP14140684 U JP 14140684U JP S6155336 U JPS6155336 U JP S6155336U
Authority
JP
Japan
Prior art keywords
substrate
masking
jig
resist
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14140684U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14140684U priority Critical patent/JPS6155336U/ja
Publication of JPS6155336U publication Critical patent/JPS6155336U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案による一実施例を示す斜視図、
第２図ａ，ｂ，ｃは本考案による他の実施例を示
す要部斜視図、第３図は従来から用いられている
半導体製造装置の基板支持台を示す斜視図である
。 １０…マスクブランク、１１…保持台、１４…
マスキング治具。 FIG. 1 is a perspective view showing an embodiment of the present invention;
FIGS. 2a, b, and c are perspective views of main parts showing another embodiment of the present invention, and FIG. 3 is a perspective view showing a substrate support stand of a conventional semiconductor manufacturing apparatus. 10...mask blank, 11...holding stand, 14...
Masking jig.

Claims (1)

【実用新案登録請求の範囲】 １ 基板上にレジスト膜を形成する装置において
、基板を固定支持する保持台と、該保持台上で上
記基板面に密着してレジストから基板表面の一部
をマスクするマスキング治具とを備えてなること
を特徴とするレジスト塗布治具。 ２ 前記マスキング治具は、保持台に可動自在に
取付けられてなることを特徴とする請求の範囲第
１項記載のレジスト塗布治具。[Claims for Utility Model Registration] 1. An apparatus for forming a resist film on a substrate, including a holder for fixedly supporting the substrate, and a part of the substrate surface that is masked from the resist by closely contacting the surface of the substrate on the holder. A resist coating jig comprising: a masking jig for masking; 2. The resist coating jig according to claim 1, wherein the masking jig is movably attached to a holding table.
JP14140684U 1984-09-17 1984-09-17 Pending JPS6155336U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14140684U JPS6155336U (en) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14140684U JPS6155336U (en) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6155336U true JPS6155336U (en) 1986-04-14

Family

ID=30699748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14140684U Pending JPS6155336U (en) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6155336U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356678U (en) * 1989-09-27 1991-05-30
JP2001162207A (en) * 1999-10-01 2001-06-19 Tokyo Electron Ltd Coating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356678U (en) * 1989-09-27 1991-05-30
JP2001162207A (en) * 1999-10-01 2001-06-19 Tokyo Electron Ltd Coating apparatus

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