JPS6155336U - - Google Patents
Info
- Publication number
- JPS6155336U JPS6155336U JP14140684U JP14140684U JPS6155336U JP S6155336 U JPS6155336 U JP S6155336U JP 14140684 U JP14140684 U JP 14140684U JP 14140684 U JP14140684 U JP 14140684U JP S6155336 U JPS6155336 U JP S6155336U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- masking
- jig
- resist
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000000873 masking effect Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案による一実施例を示す斜視図、
第２図ａ，ｂ，ｃは本考案による他の実施例を示
す要部斜視図、第３図は従来から用いられている
半導体製造装置の基板支持台を示す斜視図である
。
１０…マスクブランク、１１…保持台、１４…
マスキング治具。
FIG. 1 is a perspective view showing an embodiment of the present invention;
FIGS. 2a, b, and c are perspective views of main parts showing another embodiment of the present invention, and FIG. 3 is a perspective view showing a substrate support stand of a conventional semiconductor manufacturing apparatus. 10...mask blank, 11...holding stand, 14...
Masking jig.
Claims (1)
、基板を固定支持する保持台と、該保持台上で上
記基板面に密着してレジストから基板表面の一部
をマスクするマスキング治具とを備えてなること
を特徴とするレジスト塗布治具。 ２ 前記マスキング治具は、保持台に可動自在に
取付けられてなることを特徴とする請求の範囲第
１項記載のレジスト塗布治具。[Claims for Utility Model Registration] 1. An apparatus for forming a resist film on a substrate, including a holder for fixedly supporting the substrate, and a part of the substrate surface that is masked from the resist by closely contacting the surface of the substrate on the holder. A resist coating jig comprising: a masking jig for masking; 2. The resist coating jig according to claim 1, wherein the masking jig is movably attached to a holding table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14140684U JPS6155336U (en) | 1984-09-17 | 1984-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14140684U JPS6155336U (en) | 1984-09-17 | 1984-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6155336U true JPS6155336U (en) | 1986-04-14 |
Family
ID=30699748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14140684U Pending JPS6155336U (en) | 1984-09-17 | 1984-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6155336U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0356678U (en) * | 1989-09-27 | 1991-05-30 | ||
| JP2001162207A (en) * | 1999-10-01 | 2001-06-19 | Tokyo Electron Ltd | Coating apparatus |
-
1984
- 1984-09-17 JP JP14140684U patent/JPS6155336U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0356678U (en) * | 1989-09-27 | 1991-05-30 | ||
| JP2001162207A (en) * | 1999-10-01 | 2001-06-19 | Tokyo Electron Ltd | Coating apparatus |
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