JPH0356678U - - Google Patents
Info
- Publication number
- JPH0356678U JPH0356678U JP11204289U JP11204289U JPH0356678U JP H0356678 U JPH0356678 U JP H0356678U JP 11204289 U JP11204289 U JP 11204289U JP 11204289 U JP11204289 U JP 11204289U JP H0356678 U JPH0356678 U JP H0356678U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sandwiching
- rotating head
- rotating
- pinches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000011344 liquid material Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図〜第３図はこの考案の一実施例を示し、
第１図は回転塗布装置の斜視図、第２図はその平
面図、第３図はその側面図である。
１……回転ヘツド、２……基板、５……挟み治
具、６……アライメントマーク。
Figures 1 to 3 show an embodiment of this invention,
FIG. 1 is a perspective view of the spin coating device, FIG. 2 is a plan view thereof, and FIG. 3 is a side view thereof. 1...Rotating head, 2...Substrate, 5...Pinch jig, 6...Alignment mark.
Claims (1)
ークが設けられた基板を回転ヘツドで保持し、こ
の回転ヘツドを回転させて前記基板上に有色の液
体材料を塗布する回転塗布装置において、 前記基板を挟んで前記アライメントマークを挟
み隠す挟み治具を備えたことを特徴とする回転塗
布装置。[Claims for Utility Model Registration] A rotary coating device that holds a substrate provided with alignment marks for positioning a photomask with a rotating head, and applies a colored liquid material onto the substrate by rotating the rotating head, A rotational coating apparatus comprising a sandwiching jig that pinches and hides the alignment mark by sandwiching the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989112042U JPH086541Y2 (en) | 1989-09-27 | 1989-09-27 | Spin coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989112042U JPH086541Y2 (en) | 1989-09-27 | 1989-09-27 | Spin coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0356678U true JPH0356678U (en) | 1991-05-30 |
| JPH086541Y2 JPH086541Y2 (en) | 1996-02-28 |
Family
ID=31660496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989112042U Expired - Lifetime JPH086541Y2 (en) | 1989-09-27 | 1989-09-27 | Spin coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH086541Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101488951B1 (en) * | 2013-11-21 | 2015-02-06 | 주식회사 아이테크 | Gallery window |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155983U (en) * | 1984-03-26 | 1985-10-17 | 五十嵐 照夫 | Protective equipment for painting and welding |
| JPS6155336U (en) * | 1984-09-17 | 1986-04-14 |
-
1989
- 1989-09-27 JP JP1989112042U patent/JPH086541Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155983U (en) * | 1984-03-26 | 1985-10-17 | 五十嵐 照夫 | Protective equipment for painting and welding |
| JPS6155336U (en) * | 1984-09-17 | 1986-04-14 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101488951B1 (en) * | 2013-11-21 | 2015-02-06 | 주식회사 아이테크 | Gallery window |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH086541Y2 (en) | 1996-02-28 |