JPH0375878U - - Google Patents
Info
- Publication number
- JPH0375878U JPH0375878U JP13832389U JP13832389U JPH0375878U JP H0375878 U JPH0375878 U JP H0375878U JP 13832389 U JP13832389 U JP 13832389U JP 13832389 U JP13832389 U JP 13832389U JP H0375878 U JPH0375878 U JP H0375878U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- spin chuck
- balancer
- attached
- rotation processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 7
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の一実施例を示す回転処理装置
の斜視図、第２図は従来例を示す第１図相当図で
ある。
１……基板、１ａ……オリエンテーシヨンフラ
ツト、１ｂ……オリエンテーシヨンフラツト用欠
落部、２……移載手段、３……スピンチヤツク、
７……回転位置決め手段、１０，１０ａ……バラ
ンサ。
FIG. 1 is a perspective view of a rotary processing apparatus showing an embodiment of the present invention, and FIG. 2 is a view corresponding to FIG. 1 showing a conventional example. DESCRIPTION OF SYMBOLS 1... Board, 1a... Orientation flat, 1b... Missing part for orientation flat, 2... Transfer means, 3... Spin chuck,
7... Rotation positioning means, 10, 10a... Balancer.
Claims (1)
板をスピンチヤツクで保持して回転するように構
成した基板の回転処理装置において、 スピンチヤツクにバランサを付設するとともに
、スピンチヤツクに回転位置決め手段を設け、基
板のオリエンテーシヨンフラツト用欠落部に均衝
させて基板をスピンチヤツクへ載置可能に構成し
たことを特徴とする基板の回転処理装置。[Scope of Claim for Utility Model Registration] In a substrate rotation processing device configured to place a substrate on a spin chuck using a transfer means and rotate the substrate while holding it by the spin chuck, a balancer is attached to the spin chuck, and a balancer is attached to the spin chuck. 1. A rotation processing apparatus for a substrate, characterized in that a rotation positioning means is provided so that the substrate can be placed on a spin chuck so that the substrate can be placed on a spin chuck in balance with a notch for an orientation flat of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832389U JPH0719582Y2 (en) | 1989-11-28 | 1989-11-28 | Substrate rotation processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832389U JPH0719582Y2 (en) | 1989-11-28 | 1989-11-28 | Substrate rotation processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0375878U true JPH0375878U (en) | 1991-07-30 |
| JPH0719582Y2 JPH0719582Y2 (en) | 1995-05-10 |
Family
ID=31685430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13832389U Expired - Lifetime JPH0719582Y2 (en) | 1989-11-28 | 1989-11-28 | Substrate rotation processing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719582Y2 (en) |
-
1989
- 1989-11-28 JP JP13832389U patent/JPH0719582Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719582Y2 (en) | 1995-05-10 |
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