JPS6453755U - - Google Patents

Info

Publication number
JPS6453755U
JPS6453755U JP15060187U JP15060187U JPS6453755U JP S6453755 U JPS6453755 U JP S6453755U JP 15060187 U JP15060187 U JP 15060187U JP 15060187 U JP15060187 U JP 15060187U JP S6453755 U JPS6453755 U JP S6453755U
Authority
JP
Japan
Prior art keywords
substrate
holding mechanism
rotating
holder
donut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15060187U
Other languages
Japanese (ja)
Other versions
JPH0343232Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150601U priority Critical patent/JPH0343232Y2/ja
Publication of JPS6453755U publication Critical patent/JPS6453755U/ja
Application granted granted Critical
Publication of JPH0343232Y2 publication Critical patent/JPH0343232Y2/ja
Expired legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の基板保持機構を備えたスパツ
タリング装置の概略図で、第２図は第１図におけ
る基板保持機構の詳細拡大断面図で、第３図は他
の実施例である。 ３〜パレツト回転装置、４〜パレツト、６〜円
形開口部、７〜保持機構、８〜支持部材、９〜係
合部材、１３〜ホルダー、１５〜保持部材、Ｈ〜
開口、Ｗ〜基板。 FIG. 1 is a schematic diagram of a sputtering apparatus equipped with a substrate holding mechanism of the present invention, FIG. 2 is a detailed enlarged sectional view of the substrate holding mechanism in FIG. 1, and FIG. 3 is another embodiment. 3-pallet rotation device, 4-pallet, 6-circular opening, 7-holding mechanism, 8-supporting member, 9-engaging member, 13-holder, 15-holding member, H-
Opening, W ~ substrate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 垂直状態の回転パレツトに設けた円形開口部に
、ドーナツ状基板を保持し、この基板を自転・公
転させながら処理するスパツタリング装置におけ
る基板保持機構において、前記基板保持機構を、
前記回転パレツトの円形開口部に掛け渡した支持
部材と、この支持部材に設けた係合部材と、外周
に前記基板の開口縁部を着脱可能に保持する保持
部材を備えたホルダーとから構成し、前記係合部
材とホルダーとを遊嵌状態で、かつ、回転自在に
取り付けてなるスパツタリング装置におけるドー
ナツ状基板保持機構。 In a substrate holding mechanism in a sputtering apparatus in which a donut-shaped substrate is held in a circular opening provided in a rotating pallet in a vertical state and the substrate is processed while rotating and revolving, the substrate holding mechanism includes:
The rotating pallet is composed of a supporting member that extends over the circular opening of the rotating pallet, an engaging member provided on the supporting member, and a holder having a holding member on the outer periphery that removably holds the opening edge of the substrate. . A donut-shaped substrate holding mechanism in a sputtering apparatus, in which the engaging member and the holder are loosely fitted and rotatably attached.
JP1987150601U 1987-09-30 1987-09-30 Expired JPH0343232Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150601U JPH0343232Y2 (en) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150601U JPH0343232Y2 (en) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6453755U true JPS6453755U (en) 1989-04-03
JPH0343232Y2 JPH0343232Y2 (en) 1991-09-10

Family

ID=31423892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150601U Expired JPH0343232Y2 (en) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0343232Y2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598U (en) * 1979-06-16 1981-01-06
JPS61125170U (en) * 1984-10-12 1986-08-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598U (en) * 1979-06-16 1981-01-06
JPS61125170U (en) * 1984-10-12 1986-08-06

Also Published As

Publication number Publication date
JPH0343232Y2 (en) 1991-09-10

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