JPS56598U - - Google Patents

Info

Publication number
JPS56598U
JPS56598U JP8272679U JP8272679U JPS56598U JP S56598 U JPS56598 U JP S56598U JP 8272679 U JP8272679 U JP 8272679U JP 8272679 U JP8272679 U JP 8272679U JP S56598 U JPS56598 U JP S56598U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8272679U
Other languages
Japanese (ja)
Other versions
JPS579116Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8272679U priority Critical patent/JPS579116Y2/ja
Publication of JPS56598U publication Critical patent/JPS56598U/ja
Application granted granted Critical
Publication of JPS579116Y2 publication Critical patent/JPS579116Y2/ja
Expired legal-status Critical Current

Links

JP8272679U 1979-06-16 1979-06-16 Expired JPS579116Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8272679U JPS579116Y2 (en) 1979-06-16 1979-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8272679U JPS579116Y2 (en) 1979-06-16 1979-06-16

Publications (2)

Publication Number Publication Date
JPS56598U true JPS56598U (en) 1981-01-06
JPS579116Y2 JPS579116Y2 (en) 1982-02-22

Family

ID=29315944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8272679U Expired JPS579116Y2 (en) 1979-06-16 1979-06-16

Country Status (1)

Country Link
JP (1) JPS579116Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453755U (en) * 1987-09-30 1989-04-03
JPS6453754U (en) * 1987-09-30 1989-04-03
JPH01180968A (en) * 1988-01-13 1989-07-18 Hitachi Ltd Ion beam processing device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453755U (en) * 1987-09-30 1989-04-03
JPS6453754U (en) * 1987-09-30 1989-04-03
JPH0343233Y2 (en) * 1987-09-30 1991-09-10
JPH0343232Y2 (en) * 1987-09-30 1991-09-10
JPH01180968A (en) * 1988-01-13 1989-07-18 Hitachi Ltd Ion beam processing device

Also Published As

Publication number Publication date
JPS579116Y2 (en) 1982-02-22

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