JPH024234U - - Google Patents
Info
- Publication number
- JPH024234U JPH024234U JP8214088U JP8214088U JPH024234U JP H024234 U JPH024234 U JP H024234U JP 8214088 U JP8214088 U JP 8214088U JP 8214088 U JP8214088 U JP 8214088U JP H024234 U JPH024234 U JP H024234U
- Authority
- JP
- Japan
- Prior art keywords
- marking
- jig
- slit
- board
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の基板マーキング治具の斜視図
、第２図は本考案の基板マーキング時の位置関係
を示す断面図、第３図は従来の基板マーキング技
術を示す基板及び治具の斜視図、第４図はその従
来治具の断面図を示す。
１……永久磁石、２……スリツト板、３……基
板、４……基板ホルダー、５……永久磁石、６…
…スリツト板、７……基板固定材。
Fig. 1 is a perspective view of the board marking jig of the present invention, Fig. 2 is a sectional view showing the positional relationship during board marking of the present invention, and Fig. 3 is a perspective view of the board and jig showing the conventional board marking technique. FIG. 4 shows a sectional view of the conventional jig. 1...Permanent magnet, 2...Slit plate, 3...Substrate, 4...Substrate holder, 5...Permanent magnet, 6...
...Slit plate, 7... Board fixing material.
Claims (1)
膜装置において、薄膜となる材料をスリツトを介
して基板へマーク付けをおこなう手段として、マ
ーク用スリツト板と永久磁石とを一体加工した治
具とすることを特徴とした基板マーキング治具。 A film forming apparatus that forms thin films by vapor deposition sputtering, etc., is characterized by a jig that integrally processes a marking slit plate and a permanent magnet as a means for marking a material to be a thin film on a substrate through a slit. Board marking jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8214088U JPH024234U (en) | 1988-06-21 | 1988-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8214088U JPH024234U (en) | 1988-06-21 | 1988-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024234U true JPH024234U (en) | 1990-01-11 |
Family
ID=31306905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8214088U Pending JPH024234U (en) | 1988-06-21 | 1988-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024234U (en) |
-
1988
- 1988-06-21 JP JP8214088U patent/JPH024234U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH024234U (en) | ||
| JPH01129256U (en) | ||
| JPH01168551U (en) | ||
| JPH0418657U (en) | ||
| JPS60151580U (en) | Substrate holder for spin coating equipment | |
| JPH0444361U (en) | ||
| JPS63102756U (en) | ||
| JPS6155336U (en) | ||
| JPH0350049U (en) | ||
| JPH0469457U (en) | ||
| JPS6270430U (en) | ||
| JPS58189161U (en) | vacuum deposition machine | |
| JPH0389269U (en) | ||
| JPH0330258U (en) | ||
| JPS62174303U (en) | ||
| JPH0217550U (en) | ||
| JPH0289121U (en) | ||
| JPH01129275U (en) | ||
| JPS6381312U (en) | ||
| JPH0233257U (en) | ||
| JPH0325239U (en) | ||
| JPH02110668U (en) | ||
| JPS62128630U (en) | ||
| JPH0244097U (en) | ||
| JPS61158944U (en) |