JPS63102756U - - Google Patents
Info
- Publication number
- JPS63102756U JPS63102756U JP19767186U JP19767186U JPS63102756U JP S63102756 U JPS63102756 U JP S63102756U JP 19767186 U JP19767186 U JP 19767186U JP 19767186 U JP19767186 U JP 19767186U JP S63102756 U JPS63102756 U JP S63102756U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sputtering
- holder
- target
- mask member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案になるスパツタ装置を示す斜視
図、第２図は磁気バブルメモリ素子の主要部を説
明するための図、第３図は従来のスパツタ装置主
要部を示す断面図、である。図において、
３はベルジヤ、４はターゲツト、５は基板、６
はホルダ、７はマスク部材、７１は長穴、７２は
ボルト、７３は切欠き、をそれぞれ表す。
FIG. 1 is a perspective view showing the sputtering device of the present invention, FIG. 2 is a diagram for explaining the main parts of a magnetic bubble memory element, and FIG. 3 is a sectional view showing the main parts of the conventional sputtering device. . In the figure, 3 is the bell gear, 4 is the target, 5 is the substrate, and 6
7 represents a holder, 7 represents a mask member, 71 represents an elongated hole, 72 represents a bolt, and 73 represents a notch.
Claims (1)
ゲツト４と、スパツタによつて表面に薄膜を形成
される基板５と、該基板５を保持するホルダ６を
具えたスパツタ装置であつて、 該基板５の一部を覆い且つ該基板５の領域外に
移動可能なマスク部材７を、該ホルダ６に設けて
なることを特徴とするスパツタ装置。[Claims for Utility Model Registration] A sputtering device comprising a target 4 made of a substance to be sputtered into a bell gear 3, a substrate 5 on the surface of which a thin film is formed by sputtering, and a holder 6 for holding the substrate 5. A sputtering apparatus characterized in that the holder 6 is provided with a mask member 7 that covers a part of the substrate 5 and is movable outside the area of the substrate 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19767186U JPS63102756U (en) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19767186U JPS63102756U (en) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102756U true JPS63102756U (en) | 1988-07-04 |
Family
ID=31157637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19767186U Pending JPS63102756U (en) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102756U (en) |
-
1986
- 1986-12-23 JP JP19767186U patent/JPS63102756U/ja active Pending
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