JPH0418657U - - Google Patents

Info

Publication number
JPH0418657U
JPH0418657U JP5989290U JP5989290U JPH0418657U JP H0418657 U JPH0418657 U JP H0418657U JP 5989290 U JP5989290 U JP 5989290U JP 5989290 U JP5989290 U JP 5989290U JP H0418657 U JPH0418657 U JP H0418657U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
forming apparatus
film forming
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5989290U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5989290U priority Critical patent/JPH0418657U/ja
Publication of JPH0418657U publication Critical patent/JPH0418657U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の実施例を示し、第1図はその要
部を示す横方向の断面図、第2図は基板の斜視図
、第3図はカルーセル型スパツタリング装置の横
断面図、第4図は同縦断面図、第5図は基板ホル
ダに対するマスクの取付構造を示す断面図、第6
図は非磁性体の基板をマスクで保持する構造を示
す断面図である。 1……真空槽、6……基板ホルダ、6a……基
板取付面、17,18……マスク、W,W′……
基板。
The drawings show an embodiment of the present invention, and FIG. 1 is a lateral cross-sectional view showing the main parts thereof, FIG. 2 is a perspective view of a substrate, FIG. 3 is a cross-sectional view of a carousel type sputtering apparatus, and FIG. 4 5 is a longitudinal sectional view of the same, FIG. 5 is a sectional view showing the mounting structure of the mask to the substrate holder, and FIG.
The figure is a cross-sectional view showing a structure in which a non-magnetic substrate is held by a mask. 1... Vacuum chamber, 6... Substrate holder, 6a... Board mounting surface, 17, 18... Mask, W, W'...
substrate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空成膜装置の真空槽内で成膜される基板を保
持する基板ホルダであつて、磁性体を吸着する磁
石からなることを特徴とする真空成膜装置の基板
ホルダ。
A substrate holder for a vacuum film forming apparatus that holds a substrate to be formed into a film in a vacuum chamber of the vacuum film forming apparatus, the substrate holder being comprised of a magnet that attracts a magnetic material.
JP5989290U 1990-06-06 1990-06-06 Pending JPH0418657U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5989290U JPH0418657U (en) 1990-06-06 1990-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5989290U JPH0418657U (en) 1990-06-06 1990-06-06

Publications (1)

Publication Number Publication Date
JPH0418657U true JPH0418657U (en) 1992-02-17

Family

ID=31586791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5989290U Pending JPH0418657U (en) 1990-06-06 1990-06-06

Country Status (1)

Country Link
JP (1) JPH0418657U (en)

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