JPH0418657U - - Google Patents
Info
- Publication number
- JPH0418657U JPH0418657U JP5989290U JP5989290U JPH0418657U JP H0418657 U JPH0418657 U JP H0418657U JP 5989290 U JP5989290 U JP 5989290U JP 5989290 U JP5989290 U JP 5989290U JP H0418657 U JPH0418657 U JP H0418657U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- forming apparatus
- film forming
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
図面は本考案の実施例を示し、第1図はその要
部を示す横方向の断面図、第2図は基板の斜視図
、第3図はカルーセル型スパツタリング装置の横
断面図、第4図は同縦断面図、第5図は基板ホル
ダに対するマスクの取付構造を示す断面図、第6
図は非磁性体の基板をマスクで保持する構造を示
す断面図である。
1……真空槽、6……基板ホルダ、6a……基
板取付面、17,18……マスク、W,W′……
基板。
The drawings show an embodiment of the present invention, and FIG. 1 is a lateral cross-sectional view showing the main parts thereof, FIG. 2 is a perspective view of a substrate, FIG. 3 is a cross-sectional view of a carousel type sputtering apparatus, and FIG. 4 5 is a longitudinal sectional view of the same, FIG. 5 is a sectional view showing the mounting structure of the mask to the substrate holder, and FIG.
The figure is a cross-sectional view showing a structure in which a non-magnetic substrate is held by a mask. 1... Vacuum chamber, 6... Substrate holder, 6a... Board mounting surface, 17, 18... Mask, W, W'...
substrate.
Claims (1)
持する基板ホルダであつて、磁性体を吸着する磁
石からなることを特徴とする真空成膜装置の基板
ホルダ。 A substrate holder for a vacuum film forming apparatus that holds a substrate to be formed into a film in a vacuum chamber of the vacuum film forming apparatus, the substrate holder being comprised of a magnet that attracts a magnetic material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5989290U JPH0418657U (en) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5989290U JPH0418657U (en) | 1990-06-06 | 1990-06-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0418657U true JPH0418657U (en) | 1992-02-17 |
Family
ID=31586791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5989290U Pending JPH0418657U (en) | 1990-06-06 | 1990-06-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0418657U (en) |
-
1990
- 1990-06-06 JP JP5989290U patent/JPH0418657U/ja active Pending