JPH0469457U - - Google Patents
Info
- Publication number
- JPH0469457U JPH0469457U JP11253390U JP11253390U JPH0469457U JP H0469457 U JPH0469457 U JP H0469457U JP 11253390 U JP11253390 U JP 11253390U JP 11253390 U JP11253390 U JP 11253390U JP H0469457 U JPH0469457 U JP H0469457U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding jig
- forming mask
- permanent magnet
- substrate holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000000052 comparative effect Effects 0.000 description 2
Description
第１図は本考案に係わる成膜マスクの要部断面
図、第２図は第１図に示す成膜マスクの平面図、
第３図は比較検討用成膜マスクの要部断面図、第
４図は第３図に示す比較検討用成膜マスクの平面
図、第５図は従来の成膜マスクの断面図である。
１，１１，２１……基板押え治具（センターマス
ク）、２，１２……円板部、３，１３……凸部、
４，１４……永久磁石、２２……基板、２３……
基板ホルダー、２４……固定治具。
FIG. 1 is a cross-sectional view of the main parts of a film-forming mask according to the present invention, and FIG. 2 is a plan view of the film-forming mask shown in FIG.
3 is a cross-sectional view of a main part of a film-forming mask for comparative study, FIG. 4 is a plan view of the film-forming mask for comparative study shown in FIG. 3, and FIG. 5 is a cross-sectional view of a conventional film-forming mask. 1, 11, 21... Board holding jig (center mask), 2, 12... Disk portion, 3, 13... Convex portion,
4, 14...Permanent magnet, 22...Substrate, 23...
Board holder, 24...Fixing jig.
Claims (1)
る、基板ホルダーと、永久磁石を有し前記基板を
前記基板ホルダーに押圧する基板押え治具と、前
記基板押え治具の永久磁石に吸引される固定治具
とを備えた成膜マスクにおいて、 前記基板押え治具は永久磁石を３以上の複数、
隣接して埋設したことを特徴とする成膜マスク。[Claims for Utility Model Registration] A substrate holder, a substrate holding jig that has a permanent magnet and presses the substrate against the substrate holder, and the substrate holding jig used in the process of forming a functional film on a substrate. In a film forming mask equipped with a fixing jig that is attracted to a permanent magnet of the tool, the substrate holding jig has a plurality of three or more permanent magnets,
A film forming mask characterized by being buried adjacent to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11253390U JPH0469457U (en) | 1990-10-26 | 1990-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11253390U JPH0469457U (en) | 1990-10-26 | 1990-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469457U true JPH0469457U (en) | 1992-06-19 |
Family
ID=31860042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11253390U Pending JPH0469457U (en) | 1990-10-26 | 1990-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469457U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0238465B2 (en) * | 1980-01-30 | 1990-08-30 | Fuiritsupusu Furuuiranpenfuaburiken Nv |
-
1990
- 1990-10-26 JP JP11253390U patent/JPH0469457U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0238465B2 (en) * | 1980-01-30 | 1990-08-30 | Fuiritsupusu Furuuiranpenfuaburiken Nv |
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