JPH0476614B2 - - Google Patents

Info

Publication number
JPH0476614B2
JPH0476614B2 JP62142297A JP14229787A JPH0476614B2 JP H0476614 B2 JPH0476614 B2 JP H0476614B2 JP 62142297 A JP62142297 A JP 62142297A JP 14229787 A JP14229787 A JP 14229787A JP H0476614 B2 JPH0476614 B2 JP H0476614B2
Authority
JP
Japan
Prior art keywords
film
conductor
air flow
hot
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62142297A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63307315A (ja
Inventor
Tadao Suzuki
Mitsukuni Tsutsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62142297A priority Critical patent/JPS63307315A/ja
Priority to DE8888108679T priority patent/DE3869664D1/de
Priority to EP88108679A priority patent/EP0294689B1/en
Priority to US07/203,447 priority patent/US4829814A/en
Priority to KR1019880006875A priority patent/KR920006963B1/ko
Publication of JPS63307315A publication Critical patent/JPS63307315A/ja
Publication of JPH0476614B2 publication Critical patent/JPH0476614B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP62142297A 1987-06-09 1987-06-09 ホツトフイルム形空気流量計 Granted JPS63307315A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62142297A JPS63307315A (ja) 1987-06-09 1987-06-09 ホツトフイルム形空気流量計
DE8888108679T DE3869664D1 (de) 1987-06-09 1988-05-31 Luftstroemungsmessgeraet des heissfilmtyps.
EP88108679A EP0294689B1 (en) 1987-06-09 1988-05-31 Hot film type air flow meter
US07/203,447 US4829814A (en) 1987-06-09 1988-06-07 Hot film type air flow meter
KR1019880006875A KR920006963B1 (ko) 1987-06-09 1988-06-09 호트필름형 공기유량계

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62142297A JPS63307315A (ja) 1987-06-09 1987-06-09 ホツトフイルム形空気流量計

Publications (2)

Publication Number Publication Date
JPS63307315A JPS63307315A (ja) 1988-12-15
JPH0476614B2 true JPH0476614B2 (enExample) 1992-12-04

Family

ID=15312101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62142297A Granted JPS63307315A (ja) 1987-06-09 1987-06-09 ホツトフイルム形空気流量計

Country Status (5)

Country Link
US (1) US4829814A (enExample)
EP (1) EP0294689B1 (enExample)
JP (1) JPS63307315A (enExample)
KR (1) KR920006963B1 (enExample)
DE (1) DE3869664D1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0820292B2 (ja) * 1989-04-14 1996-03-04 株式会社日立製作所 内燃機関用吸入空気流量計測装置
JPH06105177B2 (ja) * 1989-08-29 1994-12-21 三菱電機株式会社 感熱式流量センサ
DE9006967U1 (de) * 1990-06-22 1991-10-24 Sensycon Gesellschaft für industrielle Sensorsysteme und Prozessleittechnik mbH, 30179 Hannover Widerstandselement
JP2690066B2 (ja) * 1990-12-25 1997-12-10 三菱電機株式会社 感熱式流量センサ
US5201221A (en) * 1991-03-15 1993-04-13 Ford Motor Company Flow sensor and method of manufacture
JP3240733B2 (ja) * 1993-03-17 2001-12-25 株式会社日立製作所 熱式空気流量計
US5583295A (en) * 1994-03-14 1996-12-10 Nippondenso Co., Ltd. Pressure sensor having gauge resistors and temperature compensating resistors on the same surface
US5525040A (en) * 1994-03-31 1996-06-11 B&B Financial Planning Inc. Controller for oil wells with a thermal dispersion probe
DE19509555B4 (de) * 1995-03-16 2006-01-19 Robert Bosch Gmbh Durchflußsensor
US5984641A (en) * 1997-05-05 1999-11-16 1273941 Ontario Inc. Controller for oil wells using a heated probe sensor
JP3867393B2 (ja) * 1998-03-20 2007-01-10 株式会社デンソー マイクロヒータおよびその製造方法ならびにエアフローセンサ
JP3468727B2 (ja) * 1999-09-24 2003-11-17 株式会社日立製作所 熱式空気流量計
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
CN101405581B (zh) * 2006-03-28 2011-07-20 株式会社岛津制作所 热质流量计
FR2901878B1 (fr) * 2006-06-02 2012-08-17 Sc2N Sa Capteur pour la detection du niveau d'un liquide
WO2015155630A1 (en) 2014-04-11 2015-10-15 Koninklijke Philips N.V. Needle with thin film piezoelectric sensors
DE102014217870A1 (de) * 2014-09-08 2016-03-10 Robert Bosch Gmbh Sensoranordnung zur Bestimmung wenigstens eines Parameters eines durch einen Messkanal strömenden fluiden Mediums
DE102018221847A1 (de) * 2018-12-14 2020-06-18 Robert Bosch Gmbh Elektrische Vorrichtung mit einem Sensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2925975A1 (de) * 1979-06-27 1981-01-15 Siemens Ag Mengendurchflussmesser
JPS5676012A (en) * 1979-11-27 1981-06-23 Hitachi Ltd Measuring device of suction air quantity
JPS57173758A (en) * 1981-04-20 1982-10-26 Hitachi Ltd Hot wire type current meter
DE3248462A1 (de) * 1982-12-29 1984-07-12 Robert Bosch Gmbh, 7000 Stuttgart Luftmassenmessvorrichtung
JPS59162413A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd 熱式流量計
JPS61274222A (ja) * 1985-05-30 1986-12-04 Sharp Corp 流量センサ
WO1987000917A1 (en) * 1985-08-09 1987-02-12 Motorola, Inc. Mass airflow sensor
US4635475A (en) * 1985-10-31 1987-01-13 General Motors Corporation Hot element mass airflow sensor

Also Published As

Publication number Publication date
KR920006963B1 (ko) 1992-08-22
KR890000882A (ko) 1989-03-17
DE3869664D1 (de) 1992-05-07
EP0294689B1 (en) 1992-04-01
US4829814A (en) 1989-05-16
JPS63307315A (ja) 1988-12-15
EP0294689A1 (en) 1988-12-14

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Legal Events

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