KR920006963B1 - 호트필름형 공기유량계 - Google Patents

호트필름형 공기유량계 Download PDF

Info

Publication number
KR920006963B1
KR920006963B1 KR1019880006875A KR880006875A KR920006963B1 KR 920006963 B1 KR920006963 B1 KR 920006963B1 KR 1019880006875 A KR1019880006875 A KR 1019880006875A KR 880006875 A KR880006875 A KR 880006875A KR 920006963 B1 KR920006963 B1 KR 920006963B1
Authority
KR
South Korea
Prior art keywords
thin film
conductor
serving
air flow
film type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019880006875A
Other languages
English (en)
Korean (ko)
Other versions
KR890000882A (ko
Inventor
다다오 스즈키
미츠쿠니 쓰츠이
Original Assignee
가부시키가이샤 히타치세이사쿠쇼
미타 가츠시게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 히타치세이사쿠쇼, 미타 가츠시게 filed Critical 가부시키가이샤 히타치세이사쿠쇼
Publication of KR890000882A publication Critical patent/KR890000882A/ko
Application granted granted Critical
Publication of KR920006963B1 publication Critical patent/KR920006963B1/ko
Expired legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
KR1019880006875A 1987-06-09 1988-06-09 호트필름형 공기유량계 Expired KR920006963B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP87-142297 1987-06-09
JP62142297A JPS63307315A (ja) 1987-06-09 1987-06-09 ホツトフイルム形空気流量計

Publications (2)

Publication Number Publication Date
KR890000882A KR890000882A (ko) 1989-03-17
KR920006963B1 true KR920006963B1 (ko) 1992-08-22

Family

ID=15312101

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880006875A Expired KR920006963B1 (ko) 1987-06-09 1988-06-09 호트필름형 공기유량계

Country Status (5)

Country Link
US (1) US4829814A (enExample)
EP (1) EP0294689B1 (enExample)
JP (1) JPS63307315A (enExample)
KR (1) KR920006963B1 (enExample)
DE (1) DE3869664D1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0820292B2 (ja) * 1989-04-14 1996-03-04 株式会社日立製作所 内燃機関用吸入空気流量計測装置
JPH06105177B2 (ja) * 1989-08-29 1994-12-21 三菱電機株式会社 感熱式流量センサ
DE9006967U1 (de) * 1990-06-22 1991-10-24 Sensycon Gesellschaft für industrielle Sensorsysteme und Prozessleittechnik mbH, 30179 Hannover Widerstandselement
JP2690066B2 (ja) * 1990-12-25 1997-12-10 三菱電機株式会社 感熱式流量センサ
US5201221A (en) * 1991-03-15 1993-04-13 Ford Motor Company Flow sensor and method of manufacture
JP3240733B2 (ja) * 1993-03-17 2001-12-25 株式会社日立製作所 熱式空気流量計
DE19509188B4 (de) * 1994-03-14 2004-04-29 Denso Corp., Kariya Druckdetektor
US5525040A (en) * 1994-03-31 1996-06-11 B&B Financial Planning Inc. Controller for oil wells with a thermal dispersion probe
DE19509555B4 (de) * 1995-03-16 2006-01-19 Robert Bosch Gmbh Durchflußsensor
US5984641A (en) * 1997-05-05 1999-11-16 1273941 Ontario Inc. Controller for oil wells using a heated probe sensor
JP3867393B2 (ja) * 1998-03-20 2007-01-10 株式会社デンソー マイクロヒータおよびその製造方法ならびにエアフローセンサ
JP3468727B2 (ja) * 1999-09-24 2003-11-17 株式会社日立製作所 熱式空気流量計
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
WO2007110934A1 (ja) * 2006-03-28 2007-10-04 Shimadzu Corporation 熱式質量流量計
FR2901878B1 (fr) * 2006-06-02 2012-08-17 Sc2N Sa Capteur pour la detection du niveau d'un liquide
US10952704B2 (en) 2014-04-11 2021-03-23 Koninklijke Philips N.V. Needle with thin film piezoelectric sensors
DE102014217870A1 (de) * 2014-09-08 2016-03-10 Robert Bosch Gmbh Sensoranordnung zur Bestimmung wenigstens eines Parameters eines durch einen Messkanal strömenden fluiden Mediums
DE102018221847A1 (de) * 2018-12-14 2020-06-18 Robert Bosch Gmbh Elektrische Vorrichtung mit einem Sensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2925975A1 (de) * 1979-06-27 1981-01-15 Siemens Ag Mengendurchflussmesser
JPS5676012A (en) * 1979-11-27 1981-06-23 Hitachi Ltd Measuring device of suction air quantity
JPS57173758A (en) * 1981-04-20 1982-10-26 Hitachi Ltd Hot wire type current meter
DE3248462A1 (de) * 1982-12-29 1984-07-12 Robert Bosch Gmbh, 7000 Stuttgart Luftmassenmessvorrichtung
JPS59162413A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd 熱式流量計
JPS61274222A (ja) * 1985-05-30 1986-12-04 Sharp Corp 流量センサ
EP0232312A1 (en) * 1985-08-09 1987-08-19 Motorola, Inc. Mass airflow sensor
US4635475A (en) * 1985-10-31 1987-01-13 General Motors Corporation Hot element mass airflow sensor

Also Published As

Publication number Publication date
EP0294689A1 (en) 1988-12-14
JPS63307315A (ja) 1988-12-15
JPH0476614B2 (enExample) 1992-12-04
EP0294689B1 (en) 1992-04-01
US4829814A (en) 1989-05-16
KR890000882A (ko) 1989-03-17
DE3869664D1 (de) 1992-05-07

Similar Documents

Publication Publication Date Title
KR920006963B1 (ko) 호트필름형 공기유량계
CN100382208C (zh) 电感元件
US6700393B2 (en) Capacitive sensor assembly for use in a non-contact obstacle detection system
KR960015064B1 (ko) 열식 공기 유량계
KR100581992B1 (ko) 윈드실드 이중 습기 센서
EP0401669A2 (en) An acceleration sensor
CN107438467B (zh) 用于将平面体连接到电压供应装置上的装置
US4935710A (en) High frequency filter for electric instruments
US5307076A (en) Window glass antenna device
US4933811A (en) Direct-transfer electrical component
JP3391236B2 (ja) 赤外線センサ
EP0542473B1 (en) Window glass antenna device
US5561586A (en) Electronic device with a capacity
US7263875B2 (en) Multi-layer windshield moisture detector
CN103703555A (zh) 传感装置
EP0145457B1 (en) An infrared sensor
CN1985337B (zh) 复合元件
US7312971B2 (en) Surge absorption circuit and laminated surge absorption device
JP3845564B2 (ja) 電子回路用電磁ノイズ遮蔽装置
JP2598820B2 (ja) 集積回路装置の実装構造
JPH09145464A (ja) 赤外線検出器
JPH06265387A (ja) 発熱抵抗式空気流量測定装置
CN120883032A (zh) 温度检测系统
JPH04313207A (ja) 薄膜コンデンサ
JPH0572012A (ja) 熱線式空気流量計

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19880609

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19890506

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 19880609

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 19920327

Patent event code: PE09021S01D

G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

Comment text: Decision on Publication of Application

Patent event code: PG16051S01I

Patent event date: 19920723

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 19921112

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 19921117

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 19921117

End annual number: 3

Start annual number: 1

PR1001 Payment of annual fee

Payment date: 19950713

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 19960719

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 19970714

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 19980713

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 19990729

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20000722

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20010731

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20020731

Start annual number: 11

End annual number: 11

PR1001 Payment of annual fee

Payment date: 20030801

Start annual number: 12

End annual number: 12

PR1001 Payment of annual fee

Payment date: 20040809

Start annual number: 13

End annual number: 13

PR1001 Payment of annual fee

Payment date: 20050801

Start annual number: 14

End annual number: 14

PR1001 Payment of annual fee

Payment date: 20060822

Start annual number: 15

End annual number: 15

FPAY Annual fee payment

Payment date: 20070807

Year of fee payment: 16

PR1001 Payment of annual fee

Payment date: 20070807

Start annual number: 16

End annual number: 16

EXPY Expiration of term
PC1801 Expiration of term