JPH047585B2 - - Google Patents

Info

Publication number
JPH047585B2
JPH047585B2 JP15984185A JP15984185A JPH047585B2 JP H047585 B2 JPH047585 B2 JP H047585B2 JP 15984185 A JP15984185 A JP 15984185A JP 15984185 A JP15984185 A JP 15984185A JP H047585 B2 JPH047585 B2 JP H047585B2
Authority
JP
Japan
Prior art keywords
deflector
electron beam
rectangular
sub
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15984185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221216A (ja
Inventor
Shinji Myagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15984185A priority Critical patent/JPS6221216A/ja
Publication of JPS6221216A publication Critical patent/JPS6221216A/ja
Publication of JPH047585B2 publication Critical patent/JPH047585B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP15984185A 1985-07-19 1985-07-19 電子ビ−ム露光装置 Granted JPS6221216A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15984185A JPS6221216A (ja) 1985-07-19 1985-07-19 電子ビ−ム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15984185A JPS6221216A (ja) 1985-07-19 1985-07-19 電子ビ−ム露光装置

Publications (2)

Publication Number Publication Date
JPS6221216A JPS6221216A (ja) 1987-01-29
JPH047585B2 true JPH047585B2 (enrdf_load_stackoverflow) 1992-02-12

Family

ID=15702404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15984185A Granted JPS6221216A (ja) 1985-07-19 1985-07-19 電子ビ−ム露光装置

Country Status (1)

Country Link
JP (1) JPS6221216A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283440A (en) * 1990-10-05 1994-02-01 Hitachi, Ltd. Electron beam writing system used in a cell projection method
US6031326A (en) 1997-04-01 2000-02-29 Hitachi, Ltd. Electron gun with electrode supports
JP2002008557A (ja) 2000-06-19 2002-01-11 Toshiba Corp 陰極線管装置
JP2003045359A (ja) 2001-07-30 2003-02-14 Hitachi Ltd 陰極線管

Also Published As

Publication number Publication date
JPS6221216A (ja) 1987-01-29

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