JPH0472586B2 - - Google Patents

Info

Publication number
JPH0472586B2
JPH0472586B2 JP60090663A JP9066385A JPH0472586B2 JP H0472586 B2 JPH0472586 B2 JP H0472586B2 JP 60090663 A JP60090663 A JP 60090663A JP 9066385 A JP9066385 A JP 9066385A JP H0472586 B2 JPH0472586 B2 JP H0472586B2
Authority
JP
Japan
Prior art keywords
thin film
substrate
raw material
electrode
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60090663A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61249559A (ja
Inventor
Koichi Iwata
Hideo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP9066385A priority Critical patent/JPS61249559A/ja
Publication of JPS61249559A publication Critical patent/JPS61249559A/ja
Publication of JPH0472586B2 publication Critical patent/JPH0472586B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrostatic Spraying Apparatus (AREA)
JP9066385A 1985-04-25 1985-04-25 有機薄膜形成方法及び装置 Granted JPS61249559A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9066385A JPS61249559A (ja) 1985-04-25 1985-04-25 有機薄膜形成方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9066385A JPS61249559A (ja) 1985-04-25 1985-04-25 有機薄膜形成方法及び装置

Publications (2)

Publication Number Publication Date
JPS61249559A JPS61249559A (ja) 1986-11-06
JPH0472586B2 true JPH0472586B2 (https=) 1992-11-18

Family

ID=14004771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9066385A Granted JPS61249559A (ja) 1985-04-25 1985-04-25 有機薄膜形成方法及び装置

Country Status (1)

Country Link
JP (1) JPS61249559A (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049016B2 (ja) * 1981-08-19 1985-10-30 日本ランズバ−グ株式会社 乳化液の製造方法及びその装置
JPS5949861A (ja) * 1982-09-13 1984-03-22 Nippon Ranzubaagu Kk 回転噴霧装置

Also Published As

Publication number Publication date
JPS61249559A (ja) 1986-11-06

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