JPH0472380B2 - - Google Patents

Info

Publication number
JPH0472380B2
JPH0472380B2 JP56147000A JP14700081A JPH0472380B2 JP H0472380 B2 JPH0472380 B2 JP H0472380B2 JP 56147000 A JP56147000 A JP 56147000A JP 14700081 A JP14700081 A JP 14700081A JP H0472380 B2 JPH0472380 B2 JP H0472380B2
Authority
JP
Japan
Prior art keywords
resistivity
silicon
silicon wafer
oxygen
precipitated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56147000A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5850744A (ja
Inventor
Masamichi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56147000A priority Critical patent/JPS5850744A/ja
Publication of JPS5850744A publication Critical patent/JPS5850744A/ja
Publication of JPH0472380B2 publication Critical patent/JPH0472380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56147000A 1981-09-19 1981-09-19 シリコンウエハ−の評価方法 Granted JPS5850744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56147000A JPS5850744A (ja) 1981-09-19 1981-09-19 シリコンウエハ−の評価方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56147000A JPS5850744A (ja) 1981-09-19 1981-09-19 シリコンウエハ−の評価方法

Publications (2)

Publication Number Publication Date
JPS5850744A JPS5850744A (ja) 1983-03-25
JPH0472380B2 true JPH0472380B2 (enExample) 1992-11-18

Family

ID=15420310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56147000A Granted JPS5850744A (ja) 1981-09-19 1981-09-19 シリコンウエハ−の評価方法

Country Status (1)

Country Link
JP (1) JPS5850744A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA967185A (en) * 1973-05-24 1975-05-06 Robert A. Brown Golf ball dimple spatial relationship
CA1230355A (en) * 1983-10-24 1987-12-15 William Gobush Low trajectory long distance golf ball
US4804189A (en) * 1983-10-24 1989-02-14 Acushnet Company Multiple dimple golf ball
JPS60163674A (ja) * 1984-02-07 1985-08-26 株式会社ブリヂストン ゴルフボ−ル
JPH067875B2 (ja) * 1985-06-07 1994-02-02 住友ゴム工業株式会社 ゴルフボ−ル
JP2844874B2 (ja) * 1990-07-27 1999-01-13 住友ゴム工業株式会社 ゴルフボール

Also Published As

Publication number Publication date
JPS5850744A (ja) 1983-03-25

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