JPH0471880B2 - - Google Patents

Info

Publication number
JPH0471880B2
JPH0471880B2 JP62164895A JP16489587A JPH0471880B2 JP H0471880 B2 JPH0471880 B2 JP H0471880B2 JP 62164895 A JP62164895 A JP 62164895A JP 16489587 A JP16489587 A JP 16489587A JP H0471880 B2 JPH0471880 B2 JP H0471880B2
Authority
JP
Japan
Prior art keywords
carbon
coating
base material
ash
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62164895A
Other languages
English (en)
Japanese (ja)
Other versions
JPS649900A (en
Inventor
Seiji Minora
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP16489587A priority Critical patent/JPS649900A/ja
Publication of JPS649900A publication Critical patent/JPS649900A/ja
Publication of JPH0471880B2 publication Critical patent/JPH0471880B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP16489587A 1987-06-30 1987-06-30 Jig for heat-treating semiconductor wafer Granted JPS649900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16489587A JPS649900A (en) 1987-06-30 1987-06-30 Jig for heat-treating semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16489587A JPS649900A (en) 1987-06-30 1987-06-30 Jig for heat-treating semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS649900A JPS649900A (en) 1989-01-13
JPH0471880B2 true JPH0471880B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-11-16

Family

ID=15801908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16489587A Granted JPS649900A (en) 1987-06-30 1987-06-30 Jig for heat-treating semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS649900A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960003734B1 (ko) * 1990-06-27 1996-03-21 유니온 카바이드 코팅즈 서비스 테크놀러지 코포레이션 다결정 실리콘 제조에서의 스타터 필라멘트용 흑연 척 및 그 보호 방법
JP2005133133A (ja) * 2003-10-29 2005-05-26 Toyobo Co Ltd 真空薄膜形成装置用防着板
US7732739B2 (en) * 2004-10-19 2010-06-08 Canon Anelva Corporation Substrate heat treatment apparatus and substrate transfer tray used in substrate heat treatment
JP5776415B2 (ja) * 2011-07-28 2015-09-09 住友電気工業株式会社 黒鉛の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60103087A (ja) * 1983-11-08 1985-06-07 日立化成工業株式会社 加熱用黒鉛部材
JPH0825838B2 (ja) * 1986-09-19 1996-03-13 東洋炭素株式会社 エピタキシヤル成長用黒鉛材料

Also Published As

Publication number Publication date
JPS649900A (en) 1989-01-13

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