JPH047182Y2 - - Google Patents
Info
- Publication number
- JPH047182Y2 JPH047182Y2 JP1987186215U JP18621587U JPH047182Y2 JP H047182 Y2 JPH047182 Y2 JP H047182Y2 JP 1987186215 U JP1987186215 U JP 1987186215U JP 18621587 U JP18621587 U JP 18621587U JP H047182 Y2 JPH047182 Y2 JP H047182Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- crucibles
- support plate
- temperature
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 27
- 238000001704 evaporation Methods 0.000 claims description 23
- 230000008020 evaporation Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 13
- 230000006698 induction Effects 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186215U JPH047182Y2 (fr) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186215U JPH047182Y2 (fr) | 1987-12-07 | 1987-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189953U JPH0189953U (fr) | 1989-06-13 |
| JPH047182Y2 true JPH047182Y2 (fr) | 1992-02-26 |
Family
ID=31477454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987186215U Expired JPH047182Y2 (fr) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047182Y2 (fr) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725734B2 (fr) * | 1972-03-30 | 1982-05-31 | ||
| JPS5943875A (ja) * | 1982-09-04 | 1984-03-12 | Konishiroku Photo Ind Co Ltd | 蒸発源及びその使用方法 |
| JPS60255971A (ja) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | 薄膜形成装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725734U (fr) * | 1980-07-18 | 1982-02-10 |
-
1987
- 1987-12-07 JP JP1987186215U patent/JPH047182Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725734B2 (fr) * | 1972-03-30 | 1982-05-31 | ||
| JPS5943875A (ja) * | 1982-09-04 | 1984-03-12 | Konishiroku Photo Ind Co Ltd | 蒸発源及びその使用方法 |
| JPS60255971A (ja) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | 薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0189953U (fr) | 1989-06-13 |
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