JPH0470782B2 - - Google Patents
Info
- Publication number
- JPH0470782B2 JPH0470782B2 JP59193893A JP19389384A JPH0470782B2 JP H0470782 B2 JPH0470782 B2 JP H0470782B2 JP 59193893 A JP59193893 A JP 59193893A JP 19389384 A JP19389384 A JP 19389384A JP H0470782 B2 JPH0470782 B2 JP H0470782B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- type
- semiconductor layer
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59193893A JPS6173365A (ja) | 1984-09-18 | 1984-09-18 | 半導体記憶装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59193893A JPS6173365A (ja) | 1984-09-18 | 1984-09-18 | 半導体記憶装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6173365A JPS6173365A (ja) | 1986-04-15 |
| JPH0470782B2 true JPH0470782B2 (enrdf_load_stackoverflow) | 1992-11-11 |
Family
ID=16315490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59193893A Granted JPS6173365A (ja) | 1984-09-18 | 1984-09-18 | 半導体記憶装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6173365A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5003361A (en) * | 1987-08-31 | 1991-03-26 | At&T Bell Laboratories | Active dynamic memory cell |
-
1984
- 1984-09-18 JP JP59193893A patent/JPS6173365A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6173365A (ja) | 1986-04-15 |
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