JPS6322069B2 - - Google Patents

Info

Publication number
JPS6322069B2
JPS6322069B2 JP54147322A JP14732279A JPS6322069B2 JP S6322069 B2 JPS6322069 B2 JP S6322069B2 JP 54147322 A JP54147322 A JP 54147322A JP 14732279 A JP14732279 A JP 14732279A JP S6322069 B2 JPS6322069 B2 JP S6322069B2
Authority
JP
Japan
Prior art keywords
type layer
film
layer
substrate
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54147322A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5670657A (en
Inventor
Shigeharu Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP14732279A priority Critical patent/JPS5670657A/ja
Publication of JPS5670657A publication Critical patent/JPS5670657A/ja
Publication of JPS6322069B2 publication Critical patent/JPS6322069B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Memories (AREA)
  • Static Random-Access Memory (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP14732279A 1979-11-14 1979-11-14 Semiconductor memory device Granted JPS5670657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14732279A JPS5670657A (en) 1979-11-14 1979-11-14 Semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14732279A JPS5670657A (en) 1979-11-14 1979-11-14 Semiconductor memory device

Publications (2)

Publication Number Publication Date
JPS5670657A JPS5670657A (en) 1981-06-12
JPS6322069B2 true JPS6322069B2 (enrdf_load_stackoverflow) 1988-05-10

Family

ID=15427554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14732279A Granted JPS5670657A (en) 1979-11-14 1979-11-14 Semiconductor memory device

Country Status (1)

Country Link
JP (1) JPS5670657A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107571A (en) * 1980-01-30 1981-08-26 Fujitsu Ltd Semiconductor memory storage device
JPS602780B2 (ja) * 1981-12-29 1985-01-23 富士通株式会社 半導体装置
JPS5965825A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 液晶表示素子
US4903094A (en) * 1986-08-26 1990-02-20 General Electric Company Memory cell structure having radiation hardness
US5734188A (en) * 1987-09-19 1998-03-31 Hitachi, Ltd. Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
US5264712A (en) * 1989-03-20 1993-11-23 Hitachi, Ltd. Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
US5917211A (en) * 1988-09-19 1999-06-29 Hitachi, Ltd. Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637663A (en) * 1979-09-05 1981-04-11 Mitsubishi Electric Corp Capacitor

Also Published As

Publication number Publication date
JPS5670657A (en) 1981-06-12

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