JPH0466101B2 - - Google Patents
Info
- Publication number
- JPH0466101B2 JPH0466101B2 JP60005412A JP541285A JPH0466101B2 JP H0466101 B2 JPH0466101 B2 JP H0466101B2 JP 60005412 A JP60005412 A JP 60005412A JP 541285 A JP541285 A JP 541285A JP H0466101 B2 JPH0466101 B2 JP H0466101B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- emitter
- collector
- base
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012535 impurity Substances 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 31
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 238000012544 monitoring process Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP541285A JPS61164260A (ja) | 1985-01-16 | 1985-01-16 | バイポ―ラトランジスタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP541285A JPS61164260A (ja) | 1985-01-16 | 1985-01-16 | バイポ―ラトランジスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61164260A JPS61164260A (ja) | 1986-07-24 |
JPH0466101B2 true JPH0466101B2 (fr) | 1992-10-22 |
Family
ID=11610429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP541285A Granted JPS61164260A (ja) | 1985-01-16 | 1985-01-16 | バイポ―ラトランジスタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61164260A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2352042A1 (fr) | 2010-01-29 | 2011-08-03 | Sony Corporation | Élément optique et son procédé de fabrication |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56134763A (en) * | 1980-03-26 | 1981-10-21 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Bipolar integrated circuit |
JPS5858760A (ja) * | 1981-10-05 | 1983-04-07 | Nec Corp | 半導体装置 |
JPS5871655A (ja) * | 1981-10-23 | 1983-04-28 | Toshiba Corp | 半導体装置 |
-
1985
- 1985-01-16 JP JP541285A patent/JPS61164260A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56134763A (en) * | 1980-03-26 | 1981-10-21 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Bipolar integrated circuit |
JPS5858760A (ja) * | 1981-10-05 | 1983-04-07 | Nec Corp | 半導体装置 |
JPS5871655A (ja) * | 1981-10-23 | 1983-04-28 | Toshiba Corp | 半導体装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2352042A1 (fr) | 2010-01-29 | 2011-08-03 | Sony Corporation | Élément optique et son procédé de fabrication |
Also Published As
Publication number | Publication date |
---|---|
JPS61164260A (ja) | 1986-07-24 |
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