JPH0464176B2 - - Google Patents
Info
- Publication number
- JPH0464176B2 JPH0464176B2 JP58131667A JP13166783A JPH0464176B2 JP H0464176 B2 JPH0464176 B2 JP H0464176B2 JP 58131667 A JP58131667 A JP 58131667A JP 13166783 A JP13166783 A JP 13166783A JP H0464176 B2 JPH0464176 B2 JP H0464176B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- dry etching
- conductive film
- etching
- end point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13166783A JPS6022323A (ja) | 1983-07-18 | 1983-07-18 | 絶縁層ドライエツチの終点検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13166783A JPS6022323A (ja) | 1983-07-18 | 1983-07-18 | 絶縁層ドライエツチの終点検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6022323A JPS6022323A (ja) | 1985-02-04 |
| JPH0464176B2 true JPH0464176B2 (enExample) | 1992-10-14 |
Family
ID=15063409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13166783A Granted JPS6022323A (ja) | 1983-07-18 | 1983-07-18 | 絶縁層ドライエツチの終点検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022323A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1486412B1 (en) | 2003-06-10 | 2014-05-07 | Campagnolo S.R.L. | Bicycle pedal crank |
| EP2110302A1 (en) | 2003-06-11 | 2009-10-21 | CAMPAGNOLO S.r.l. | Bicycle component |
| EP1818252B1 (en) | 2006-02-14 | 2011-09-07 | CAMPAGNOLO S.r.l. | Bicycle pedal crank and method for manufactoring such a pedal crank |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587437A (en) * | 1978-12-26 | 1980-07-02 | Fujitsu Ltd | Method of detecting completion of dry etching |
| JPS5713745A (en) * | 1980-06-30 | 1982-01-23 | Fujitsu Ltd | Detecting method for ion etching finishing point |
| JPS57118644A (en) * | 1981-01-16 | 1982-07-23 | Seiko Epson Corp | Manufacture of semiconductor device |
-
1983
- 1983-07-18 JP JP13166783A patent/JPS6022323A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6022323A (ja) | 1985-02-04 |
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