Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co LtdfiledCriticalShin Etsu Chemical Co Ltd
Priority to JP29567786ApriorityCriticalpatent/JPS63147807A/ja
Publication of JPS63147807ApublicationCriticalpatent/JPS63147807A/ja
Publication of JPH0463802B2publicationCriticalpatent/JPH0463802B2/ja
Procede de fabrication de pieces ou poudres en un compose de silicium ou d'un metal, par reaction de pieces ou poudres de silicium ou d'un metal a l'etat solide sur un gaz