JPS5424300A - Production of alpha-type silicon nitride - Google Patents

Production of alpha-type silicon nitride

Info

Publication number
JPS5424300A
JPS5424300A JP8907777A JP8907777A JPS5424300A JP S5424300 A JPS5424300 A JP S5424300A JP 8907777 A JP8907777 A JP 8907777A JP 8907777 A JP8907777 A JP 8907777A JP S5424300 A JPS5424300 A JP S5424300A
Authority
JP
Japan
Prior art keywords
silicon nitride
type silicon
alpha
production
regulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8907777A
Other languages
Japanese (ja)
Inventor
Tadasuke Shigi
Koichi Kanbara
Hirotaka Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP8907777A priority Critical patent/JPS5424300A/en
Publication of JPS5424300A publication Critical patent/JPS5424300A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE: To produce α-type silicon nitride of high α-Si3N4 content by regulating a heating rate to the nitriding temp. of Si to a specified range so as to control the formation of β-Si3N4.
COPYRIGHT: (C)1979,JPO&Japio
JP8907777A 1977-07-25 1977-07-25 Production of alpha-type silicon nitride Pending JPS5424300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8907777A JPS5424300A (en) 1977-07-25 1977-07-25 Production of alpha-type silicon nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8907777A JPS5424300A (en) 1977-07-25 1977-07-25 Production of alpha-type silicon nitride

Publications (1)

Publication Number Publication Date
JPS5424300A true JPS5424300A (en) 1979-02-23

Family

ID=13960788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8907777A Pending JPS5424300A (en) 1977-07-25 1977-07-25 Production of alpha-type silicon nitride

Country Status (1)

Country Link
JP (1) JPS5424300A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256310A (en) * 1985-09-04 1987-03-12 Denki Kagaku Kogyo Kk Production of aluminum nitride
JPS63147807A (en) * 1986-12-11 1988-06-20 Shin Etsu Chem Co Ltd Production of silicon nitride having high content of alpha form
JPS63170267A (en) * 1987-01-08 1988-07-14 信越化学工業株式会社 Manufacture of silicon nitride sintered body
US5075091A (en) * 1986-04-11 1991-12-24 Bayer Aktiengesellschaft Process for the preparation of silicon nitride

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256310A (en) * 1985-09-04 1987-03-12 Denki Kagaku Kogyo Kk Production of aluminum nitride
US5075091A (en) * 1986-04-11 1991-12-24 Bayer Aktiengesellschaft Process for the preparation of silicon nitride
JPS63147807A (en) * 1986-12-11 1988-06-20 Shin Etsu Chem Co Ltd Production of silicon nitride having high content of alpha form
JPH0463802B2 (en) * 1986-12-11 1992-10-13 Shinetsu Chem Ind Co
JPS63170267A (en) * 1987-01-08 1988-07-14 信越化学工業株式会社 Manufacture of silicon nitride sintered body

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