JPH046090B2 - - Google Patents

Info

Publication number
JPH046090B2
JPH046090B2 JP57029960A JP2996082A JPH046090B2 JP H046090 B2 JPH046090 B2 JP H046090B2 JP 57029960 A JP57029960 A JP 57029960A JP 2996082 A JP2996082 A JP 2996082A JP H046090 B2 JPH046090 B2 JP H046090B2
Authority
JP
Japan
Prior art keywords
oxide film
substrate
heat treatment
temperature
phosphorus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57029960A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58147126A (ja
Inventor
Hiroshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57029960A priority Critical patent/JPS58147126A/ja
Publication of JPS58147126A publication Critical patent/JPS58147126A/ja
Publication of JPH046090B2 publication Critical patent/JPH046090B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Formation Of Insulating Films (AREA)
JP57029960A 1982-02-26 1982-02-26 熱酸化膜形成方法 Granted JPS58147126A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57029960A JPS58147126A (ja) 1982-02-26 1982-02-26 熱酸化膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57029960A JPS58147126A (ja) 1982-02-26 1982-02-26 熱酸化膜形成方法

Publications (2)

Publication Number Publication Date
JPS58147126A JPS58147126A (ja) 1983-09-01
JPH046090B2 true JPH046090B2 (enExample) 1992-02-04

Family

ID=12290539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57029960A Granted JPS58147126A (ja) 1982-02-26 1982-02-26 熱酸化膜形成方法

Country Status (1)

Country Link
JP (1) JPS58147126A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19950563A1 (de) * 1999-10-20 2001-05-03 Infineon Technologies Ag Verfahren zur Reinigung einer monokristallinen Silizium-Halbleiterscheibe
JP5568054B2 (ja) 2011-05-16 2014-08-06 トヨタ自動車株式会社 半導体素子の製造方法

Also Published As

Publication number Publication date
JPS58147126A (ja) 1983-09-01

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