JPH0460636U - - Google Patents

Info

Publication number
JPH0460636U
JPH0460636U JP10261290U JP10261290U JPH0460636U JP H0460636 U JPH0460636 U JP H0460636U JP 10261290 U JP10261290 U JP 10261290U JP 10261290 U JP10261290 U JP 10261290U JP H0460636 U JPH0460636 U JP H0460636U
Authority
JP
Japan
Prior art keywords
substrate
elevating
pusher
support
abutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10261290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0751229Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10261290U priority Critical patent/JPH0751229Y2/ja
Publication of JPH0460636U publication Critical patent/JPH0460636U/ja
Application granted granted Critical
Publication of JPH0751229Y2 publication Critical patent/JPH0751229Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Control Of Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
  • Liquid Crystal (AREA)
  • Jigs For Machine Tools (AREA)
  • Special Conveying (AREA)
JP10261290U 1990-09-29 1990-09-29 基板の位置整合装置 Expired - Fee Related JPH0751229Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10261290U JPH0751229Y2 (ja) 1990-09-29 1990-09-29 基板の位置整合装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10261290U JPH0751229Y2 (ja) 1990-09-29 1990-09-29 基板の位置整合装置

Publications (2)

Publication Number Publication Date
JPH0460636U true JPH0460636U (enrdf_load_stackoverflow) 1992-05-25
JPH0751229Y2 JPH0751229Y2 (ja) 1995-11-22

Family

ID=31847007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10261290U Expired - Fee Related JPH0751229Y2 (ja) 1990-09-29 1990-09-29 基板の位置整合装置

Country Status (1)

Country Link
JP (1) JPH0751229Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007073646A (ja) * 2005-09-05 2007-03-22 Tokyo Electron Ltd 基板位置合わせ装置および基板収容ユニット
WO2013046552A1 (ja) * 2011-09-29 2013-04-04 川崎重工業株式会社 搬送システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007073646A (ja) * 2005-09-05 2007-03-22 Tokyo Electron Ltd 基板位置合わせ装置および基板収容ユニット
WO2013046552A1 (ja) * 2011-09-29 2013-04-04 川崎重工業株式会社 搬送システム

Also Published As

Publication number Publication date
JPH0751229Y2 (ja) 1995-11-22

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Legal Events

Date Code Title Description
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