JPH0460636U - - Google Patents
Info
- Publication number
- JPH0460636U JPH0460636U JP10261290U JP10261290U JPH0460636U JP H0460636 U JPH0460636 U JP H0460636U JP 10261290 U JP10261290 U JP 10261290U JP 10261290 U JP10261290 U JP 10261290U JP H0460636 U JPH0460636 U JP H0460636U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- elevating
- pusher
- support
- abutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 230000003028 elevating effect Effects 0.000 claims description 8
Landscapes
- Specific Conveyance Elements (AREA)
- Liquid Crystal (AREA)
- Jigs For Machine Tools (AREA)
- Special Conveying (AREA)
- Control Of Conveyors (AREA)
Description
第１図は本考案に係る位置整合装置の一実施例
を示す平面図、第２図は第１図中の−線矢視
縦断面図、第３図は第１図中の−線矢視側面
図、第４図は従来例を示す平面図、第５図は基板
搬送装置の側面図である。
１……基板搬送手段、２……基板支持具、１０
……位置整合装置、１１……プツシヤー、１２…
…基板当接具、１３……当接具支持ベース、１８
……昇降台、２２……ストツパー、２５……昇降
駆動手段、２６……昇降操作ロツド、３０……進
退駆動手段、３１……コロ、３２……カム、１６
，２８……付勢手段、Ｗ……基板。
FIG. 1 is a plan view showing an embodiment of the position alignment device according to the present invention, FIG. 2 is a longitudinal sectional view taken along the line - in FIG. 1, and FIG. 4 is a plan view showing a conventional example, and FIG. 5 is a side view of the substrate transfer device. 1...Substrate transport means, 2...Substrate support, 10
...Position alignment device, 11... Pusher, 12...
... Board contact tool, 13 ... Contact tool support base, 18
... Lifting platform, 22... Stopper, 25... Elevating drive means, 26... Elevating and lowering operation rod, 30... Advance/retreat drive means, 31... Roller, 32... Cam, 16
, 28... biasing means, W... substrate.
Claims (1)
れ、基板当接具と当接具支持ベースとから成る一
対のプツシヤーと、各プツシヤーを対面水平方向
へ進退自在に搭載した一対の昇降台と、各プツシ
ヤーを昇降台を介して基板支持具の高さに位置す
る上昇位置と基板支持具の下方に位置する下降位
置に昇降させる昇降駆動手段と、各プツシヤーの
基板当接具を上昇位置で基板支持具に向けて進退
させる進退駆動手段とを具備して成り、基板支持
具で支持した基板を一対のプツシヤーでその対面
方向へ位置整合するように構成した基板の位置整
合装置において、 昇降駆動手段は、昇降ストロークより長い余剰
ストロークを有する昇降操作ロツドと、上昇位置
で昇降台の上昇を規制するストツパーを備え、 プツシヤーの進退駆動手段は、昇降操作ロツド
の上端部に設けられたコロと、コロに係合し当接
具支持ブースに固定されたカムと、プツシヤーを
後退側へ直接又は間接的に付勢する付勢手段を具
備して成り、昇降操作ロツドの余剰ストレークで
コロを上昇させて基板当接具の支持ベースを進退
させるように構成したことを特徴とする基板の位
置整合装置。[Claims for Utility Model Registration] A pair of pushers arranged opposite to each other on both sides of a substrate support of a substrate conveyance means and consisting of a substrate abutting tool and an abutting tool support base, each pusher being capable of moving forward and backward in a horizontal direction facing each other. A pair of lifting tables mounted thereon, a lifting drive means for raising and lowering each pusher via the lifting table to a raised position located at the height of the substrate support and a lowered position located below the substrate support, and a substrate of each pusher. The substrate is provided with an advancing/retracting drive means for advancing and retracting the abutting tool toward the substrate support in the raised position, and is configured to align the substrate supported by the substrate support in the facing direction with a pair of pushers. In the position alignment device, the elevating drive means includes an elevating operating rod having a surplus stroke longer than the elevating stroke, and a stopper that restricts the elevation of the elevating platform at the elevated position, and the pusher advance/retreat driving means comprises an elevating operating rod having a surplus stroke longer than the elevating stroke; A cam that engages with the roller and is fixed to the abutting tool support booth, and a biasing means that directly or indirectly biases the pusher toward the rearward side. 1. A substrate position alignment device characterized in that the support base of the substrate abutting tool is moved forward and backward by raising a roller using a surplus straight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10261290U JPH0751229Y2 (en) | 1990-09-29 | 1990-09-29 | Substrate alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10261290U JPH0751229Y2 (en) | 1990-09-29 | 1990-09-29 | Substrate alignment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0460636U true JPH0460636U (en) | 1992-05-25 |
| JPH0751229Y2 JPH0751229Y2 (en) | 1995-11-22 |
Family
ID=31847007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10261290U Expired - Fee Related JPH0751229Y2 (en) | 1990-09-29 | 1990-09-29 | Substrate alignment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0751229Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007073646A (en) * | 2005-09-05 | 2007-03-22 | Tokyo Electron Ltd | Substrate positioner and substrate containing unit |
| WO2013046552A1 (en) * | 2011-09-29 | 2013-04-04 | 川崎重工業株式会社 | Transport system |
-
1990
- 1990-09-29 JP JP10261290U patent/JPH0751229Y2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007073646A (en) * | 2005-09-05 | 2007-03-22 | Tokyo Electron Ltd | Substrate positioner and substrate containing unit |
| JP4642610B2 (en) * | 2005-09-05 | 2011-03-02 | 東京エレクトロン株式会社 | Substrate alignment device and substrate accommodation unit |
| WO2013046552A1 (en) * | 2011-09-29 | 2013-04-04 | 川崎重工業株式会社 | Transport system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0751229Y2 (en) | 1995-11-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |