JPH045959B2 - - Google Patents

Info

Publication number
JPH045959B2
JPH045959B2 JP62125480A JP12548087A JPH045959B2 JP H045959 B2 JPH045959 B2 JP H045959B2 JP 62125480 A JP62125480 A JP 62125480A JP 12548087 A JP12548087 A JP 12548087A JP H045959 B2 JPH045959 B2 JP H045959B2
Authority
JP
Japan
Prior art keywords
feed screw
connecting member
stage
axis
mover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62125480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63290988A (ja
Inventor
Satoshi Takahashi
Masayuki Hachitani
Noboru Maeda
Ryutaro Umeno
Hiroshi Aikawa
Keiichi Nagasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP62125480A priority Critical patent/JPS63290988A/ja
Publication of JPS63290988A publication Critical patent/JPS63290988A/ja
Publication of JPH045959B2 publication Critical patent/JPH045959B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Transmission Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62125480A 1987-05-22 1987-05-22 ステージ移動機構 Granted JPS63290988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62125480A JPS63290988A (ja) 1987-05-22 1987-05-22 ステージ移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62125480A JPS63290988A (ja) 1987-05-22 1987-05-22 ステージ移動機構

Publications (2)

Publication Number Publication Date
JPS63290988A JPS63290988A (ja) 1988-11-28
JPH045959B2 true JPH045959B2 (enrdf_load_stackoverflow) 1992-02-04

Family

ID=14911134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62125480A Granted JPS63290988A (ja) 1987-05-22 1987-05-22 ステージ移動機構

Country Status (1)

Country Link
JP (1) JPS63290988A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004000843A (ja) * 2002-05-31 2004-01-08 Hirata Corp 流体塗布装置
JP5178675B2 (ja) * 2009-09-28 2013-04-10 日立建機株式会社 リニアアクチュエータ
JP5397236B2 (ja) * 2010-01-18 2014-01-22 Ｓｍｃ株式会社 送りねじ機構
JP6933626B2 (ja) * 2018-10-30 2021-09-08 株式会社日進製作所 搬送装置、処理ユニットおよび処理システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6113101A (ja) * 1984-06-29 1986-01-21 Tokyo Optical Co Ltd 送り機構
JPS63140161A (ja) * 1986-12-03 1988-06-11 Matsushita Electric Ind Co Ltd 位置決めテ−ブル

Also Published As

Publication number Publication date
JPS63290988A (ja) 1988-11-28

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