JPS63290988A - ステージ移動機構 - Google Patents

ステージ移動機構

Info

Publication number
JPS63290988A
JPS63290988A JP62125480A JP12548087A JPS63290988A JP S63290988 A JPS63290988 A JP S63290988A JP 62125480 A JP62125480 A JP 62125480A JP 12548087 A JP12548087 A JP 12548087A JP S63290988 A JPS63290988 A JP S63290988A
Authority
JP
Japan
Prior art keywords
moving stage
axis
connector
feed screw
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62125480A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045959B2 (enrdf_load_stackoverflow
Inventor
聡 高橋
昌幸 蜂谷
昇 前田
梅野　龍太郎
相川　博
恵一 長崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP62125480A priority Critical patent/JPS63290988A/ja
Publication of JPS63290988A publication Critical patent/JPS63290988A/ja
Publication of JPH045959B2 publication Critical patent/JPH045959B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Transmission Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62125480A 1987-05-22 1987-05-22 ステージ移動機構 Granted JPS63290988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62125480A JPS63290988A (ja) 1987-05-22 1987-05-22 ステージ移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62125480A JPS63290988A (ja) 1987-05-22 1987-05-22 ステージ移動機構

Publications (2)

Publication Number Publication Date
JPS63290988A true JPS63290988A (ja) 1988-11-28
JPH045959B2 JPH045959B2 (enrdf_load_stackoverflow) 1992-02-04

Family

ID=14911134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62125480A Granted JPS63290988A (ja) 1987-05-22 1987-05-22 ステージ移動機構

Country Status (1)

Country Link
JP (1) JPS63290988A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004000843A (ja) * 2002-05-31 2004-01-08 Hirata Corp 流体塗布装置
WO2011036969A1 (ja) * 2009-09-28 2011-03-31 日立建機株式会社 リニアアクチュエータ
JP2011144911A (ja) * 2010-01-18 2011-07-28 Smc Corp 送りねじ機構
JP2020069547A (ja) * 2018-10-30 2020-05-07 株式会社日進製作所 搬送装置、処理ユニットおよび処理システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6113101A (ja) * 1984-06-29 1986-01-21 Tokyo Optical Co Ltd 送り機構
JPS63140161A (ja) * 1986-12-03 1988-06-11 Matsushita Electric Ind Co Ltd 位置決めテ−ブル

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6113101A (ja) * 1984-06-29 1986-01-21 Tokyo Optical Co Ltd 送り機構
JPS63140161A (ja) * 1986-12-03 1988-06-11 Matsushita Electric Ind Co Ltd 位置決めテ−ブル

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004000843A (ja) * 2002-05-31 2004-01-08 Hirata Corp 流体塗布装置
WO2011036969A1 (ja) * 2009-09-28 2011-03-31 日立建機株式会社 リニアアクチュエータ
JP2011069449A (ja) * 2009-09-28 2011-04-07 Hitachi Constr Mach Co Ltd リニアアクチュエータ
JP2011144911A (ja) * 2010-01-18 2011-07-28 Smc Corp 送りねじ機構
US8973453B2 (en) 2010-01-18 2015-03-10 Smc Kabushiki Kaisha Feed screw mechanism
JP2020069547A (ja) * 2018-10-30 2020-05-07 株式会社日進製作所 搬送装置、処理ユニットおよび処理システム

Also Published As

Publication number Publication date
JPH045959B2 (enrdf_load_stackoverflow) 1992-02-04

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